研究目的
This work reported the micromachining of lithium niobate for the prototyping of a circular diaphragm resonant biosensor using laser micromachining. The micromachining process was optimised to provide high-quality, economical, and sustainably manufactured lithium niobate sensor prototypes.
研究成果
The good match between the modelling and experimental results showed that the laser-micromachined sensor has a high potential to be used for resonant-based biosensing as the sensor had a good-quality surface for and a high-quality factor for the accurate measurement of the frequency, whilst having a cost-effective production method for what needs to be a disposable technology.
研究不足
The effect of the hatch pitch and pulse distance on the resulting Sa was very much dependent on the used laser energy; in particular, the hatch pitch and pulse distance had a high impact on Sa at the highest pulse energy, while they had a negligible effect at the lowest energy setting.
1：Experimental Design and Method Selection:
The methodology involved laser micromachining of lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design. A qualitative visual check of the surface was performed using scanning electron microscopy, and the surface roughness was quantitatively investigated using an optical surface profiler.
2：Sample Selection and Data Sources:
Samples of lithium niobate material were fabricated using laser micromachining.
3：List of Experimental Equipment and Materials:
The LMM platform integrates a Yb-doped femtoseconds (fs) 5W laser source from Amplitude Systems that operates at a central wavelength of 1030 nm and has a maximum repetition rate of 500 KHz.
4：Experimental Procedures and Operational Workflow:
The laser processing parameters were optimised for micromachining lithium niobate sensors, where the goal was to obtain a surface roughness that was as low as possible while the material removal rates should be as high as possible in order to reduce the laser processing times.
5：Data Analysis Methods:
The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
