研究目的
Investigating the influence of sensitive porous films obtained by pulsed laser deposition (PLD) on the response of surface acoustic wave (SAW) sensors on hydrogen at room temperature (RT).
研究成果
The study confirmed that the high porosity of the film and the bilayer structure leads to a higher frequency shift and allows the possibility to make tests at lower concentrations. The best sensor, Pd-1500/TiO2-600, demonstrated significant sensitivity and a low limit of detection for hydrogen at room temperature. The PLD method was shown to be effective for developing sensitive porous and nanostructured films for gas detection.
研究不足
The study was limited to hydrogen concentrations up to 2% for safety reasons, as hydrogen is explosive at a minimum concentration of 4%. The morphology of the films was found to be unstable at pressures above 900 mTorr, limiting the range of deposition pressures that could be used.
1：Experimental Design and Method Selection:
The study utilized pulsed laser deposition (PLD) to create monolayer films of TiO2 and bilayer films of Pd/TiO2 on quartz substrates of SAW sensors. The oxygen and argon pressure in the PLD deposition chamber was varied to achieve different morphologies of the sensitive films.
2：Sample Selection and Data Sources:
Quartz substrates were used for the SAW sensors. The morphology of the sensitive layers and bilayers was studied by scanning electron microscopy (SEM).
3：List of Experimental Equipment and Materials:
A Nd-YAG laser (EKSPLA NL301HT) was used for film deposition. The sensors were tested using a DHPVA-200 FEMTO amplifier with a CNT-91 Pendullum frequency counter connected to a computer software, Time View
4：Experimental Procedures and Operational Workflow:
The depositions were made on the quartz SAW sensor substrates using a mask to limit the deposition only in the sensitive area of the sensor. The sensors were tested at different hydrogen concentrations at room temperature.
5：Data Analysis Methods:
The sensitivity and limit of detection (LOD) of the SAW sensors were determined from an average sensitivity values of the determinations at each gas concentration.
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