研究目的
Investigating the smoothing effects of CO2 laser of top-hat and Gaussian intensity on ground fused silica surfaces.
研究成果
The experiments and simulations demonstrated that lower power density combined with slowly scanning speed could improve the processing quality of laser polishing. Ground surface of fused silica with initial roughness of > 500 nm was smoothed to < 0.5 nm with both Gaussian beam and top-hat beam. Beam shaping is able to reduce peak power density of high power processing laser and smoothing efficiency might be increased without the loss of the processed quality of glass.
研究不足
The study focuses on the smoothing effects of CO2 laser on fused silica surfaces, but the waviness left by grinding was difficult to relieve. The processing is susceptible to waviness due to beam scanning and thermal gradient.
1：Experimental Design and Method Selection:
The study examined the smoothing effects of CO2 laser with top-hat and Gaussian intensity profiles on ground fused silica surfaces. A numerical model was established to investigate thermal and hydrodynamic transient processes.
2：Sample Selection and Data Sources:
Fused silica samples of 50 mm in diameter and 5 mm thick with initial surface micro-roughness of 500 nm (RMS) were used.
3：List of Experimental Equipment and Materials:
CO2 laser (Universal ULR-50, USA), refractive beam shaper (πShaper, Germany), mid-infrared camera (LaserDec CL200, CINOGY, Germany), optical profilometry (4D NanoCam, USA), atomic force microscope (AFM).
4：Experimental Procedures and Operational Workflow:
The fused silica sample was treated by CO2 laser raster scanning controlled by a two-dimensional motion stage. The scanning was along the x-axis perpendicular to the top-hat direction.
5：Data Analysis Methods:
Surface roughness (RMS) was evaluated with an optical profilometry and AFM. A band pass filter ranging from 0.01 mm to 0.12 mm was used to investigate the micro-roughness.
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