摘要： In this paper, we report on an optical tolerance analysis of the submillimeter atmospheric multi-beam limb sounder, STEAMR. Physical optics and ray-tracing methods were used to quantify and separate errors in beam pointing and distortion due to re?ector misalignment and primary re?ector surface deformations. Simulations were performed concurrently with the manufacturing of a multi-beam demonstrator of the relay optical system which shapes and images the beams to their corresponding receiver feed horns. Results from Monte Carlo simulations show that the inserts used for re?ector mounting should be positioned with an overall accuracy better than 100 m ( 1/10 wavelength). Analyses of primary re?ector surface deformations show that a deviation of magnitude 100 m can be tolerable before deployment, whereas the corresponding variations should be less than 30 m during operation. The most sensitive optical elements in terms of misalignments are found near the focal plane. This localized sensitivity is attributed to the off-axis nature of the beams at this location. Post-assembly mechanical measurements of the re?ectors in the demonstrator show that alignment better than 50 m could be obtained.