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[ASME ASME 2014 International Mechanical Engineering Congress and Exposition - Montreal, Quebec, Canada (Friday 14 November 2014)] Volume 10: Micro- and Nano-Systems Engineering and Packaging - Effect of Imperfections on Fused Silica Shell Resonators

DOI:10.1115/imece2014-39303 出版年份:2014 更新时间:2025-09-23 15:21:01
摘要: Axisymmetric shell resonators have been attractive candidates for high performance MEMS vibratory gyroscopes because of their high quality factor, low sensitivity to environmental vibrations and electrostatic tuning capability. Fused silica shell resonators made by blow torch molding with high quality factor could perform as high performance MEMS gyroscopes. Despite such advantageous features, the performance of these is limited by geometric imperfections that occur during fabrication. This paper investigates effect of geometric asymmetries such as height and radius imperfections, notch, and mass imbalance in the rim of gyroscopes on the split in the natural frequencies of the n=2 wineglass modes. Numerical simulation shows that perfect fused silica shell has 13929 Hz natural resonance frequencies without any frequency split. Analysis of imperfect shell reveals that frequency split is very sensitive to edge geometric imperfection and mass imbalance in the rim. On the other hand, ??? is not very sensitive to the notch in the rim of shell and height imperfection less than 40????.
作者: Ali Darvishian,Behrouz Shiari,Jae Yoong Cho,Khalil Najafi
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Investigating the effect of geometric asymmetries such as height and radius imperfections, notch, and mass imbalance in the rim of gyroscopes on the split in the natural frequencies of the n=2 wineglass modes.

The frequency mismatch increases almost linearly with the increase of the rim mass imperfection. A notch at the rim of the resonator changes both wineglass resonant frequencies but does not change frequency split. Frequency split is very sensitive to edge imperfections but not very sensitive to height imperfections less than 40 ????. Using symmetric mold to prevent edge imperfections can reduce frequency split.

The study is limited to the analysis of specific geometric imperfections and their effects on frequency split. The fabrication process may introduce other types of imperfections not considered in this study.

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