研究目的
To characterize defective but practically useful graphene as nanometer devices.
研究成果
The study demonstrated that defective graphene directly grown on SiO2 substrate by alcohol-CVD can be used to fabricate nanodevices with promising applications in various fields. The unique features of graphene were preserved even in disordered material, showing potential for applications in single-electron transistors, single-molecule transistors, and van-der-Waals stacked nanodevices.
研究不足
The mechanism of transport in the present CVD graphene nanostructures is still not known in details, and is an interesting subject of study considering the possibility of application in several genres of nanodevices made of graphene.
1:Experimental Design and Method Selection:
Graphene layers were grown directly on SiO2 substrates using alcohol-chemical vapor deposition (alcohol-CVD) without the use of any catalytic metal. The graphene film was delineated into nanometer structures by electron beam lithography.
2:Sample Selection and Data Sources:
The substrate was heated up to 1000oC under specific conditions, and ethanol was used as a carbon source.
3:List of Experimental Equipment and Materials:
Raman spectrophotometer, high resolution scanning electron microscopy, optical reflectometer, atomic force microscope, EB writer, positive resist, contact aligner, low-temperature prober, semiconductor parameter analyzer.
4:Experimental Procedures and Operational Workflow:
The graphene film was grown, delineated into nanostructures, and characterized using various techniques.
5:Data Analysis Methods:
The Raman spectra, sheet resistance, and conductance were analyzed to understand the properties of the graphene nanostructures.
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High resolution scanning electron microscopy
JSM-7001F FESEM
JEOL
Study of high resolution scanning electron microscopy
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Semiconductor parameter analyzer
4156C
Agilent
Measurement of temperature dependence of graphene sheet resistance and conductance
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Raman spectrophotometer
NRS-7100
JASCO
Studying Raman scattering of graphene films
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Optical reflectometer
FE-3000
Otsuka Electronics
Thickness measurement
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Atomic force microscope
SPI3800
SEIKO Instruments Inc. (SII)
Thickness measurement
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EB writer
ELS-7700K
Elionix Inc.
EB lithography
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Positive resist
OEBR-1000
Tokyo Ohka Kogyo
Used in EB lithography
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Contact aligner
MJB4
SUSS MicroTec KK
Photolithography
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Positive resist
OFPR-800LB
Tokyo Ohka Kogyo
Used in photolithography
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Low-temperature prober
Grail21-205-6-LV-R
Nagase Techno-Engineering
Measurement of temperature dependence of graphene sheet resistance and conductance
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