摘要： The gate conduction mechanisms in p-gallium nitride (GaN)/AlGaN/GaN enhancement mode transistors are investigated using temperature-dependent dc gate current measurements. In each of the different gate voltage regions, a physical model is proposed and compared to experiment. At negative gate bias, Poole–Frenkel emission (PFE) occurs within the passivation dielectric from gate to source. At positive gate bias, the p-GaN/AlGaN/GaN “p-i-n” diode is in forward operation mode, and the gate current is limited by hole supply at the Schottky contact. At low gate voltages, the current is governed by thermionic emission with Schottky barrier lowering in dislocation lines. Increasing the gate voltage and temperature results in thermally assisted tunneling (TAT) across the same barrier. An improved gate process reduces the gate current in the positive gate bias region and eliminates the onset of TAT. However, at high positive gate bias, a sharp increase in current is observed originating from PFE at the metal/p-GaN interface. Using the extracted conduction mechanisms for both devices, accurate lifetime models are constructed. The device fabricated with the novel gate process exhibits a maximum gate voltage of 7.2 V at t1% = 10 years.