研究目的
To study the fabrication and improved field emission properties of carbon nanotube (CNT) cold cathode electron emitters with electrical aging.
研究成果
The study successfully developed an electrical aging technique for enhanced electron emission from carbon nanotube emitter cold cathode. The electron emission current increased 1.8 times after 6 hours of electrical aging. The technique uses Joule heat as thermal energy for self-annealing, resulting in high-performance CNT emitters.
研究不足
The study focuses on the electrical aging technique for enhancing electron emission from CNT emitters. The limitations include the need for precise control of the electrical aging bias to avoid destroying the CNT emitters and the requirement for high-temperature annealing which may not be feasible for all applications.
1：Experimental Design and Method Selection:
The study involved the fabrication of CNT emitters and the application of electrical aging to improve their field emission properties. The electrical aging was performed using bias voltage at the point where Joule heating appeared.
2：Sample Selection and Data Sources:
CNT emitters were fabricated with a diameter of 3 μm and a pitch of 15 μm on a Si wafer using triode dc-PECVD. The emitters were then annealed at 1000 °C for 60 minutes under Argon gas to prevent impurity penetration.
3：List of Experimental Equipment and Materials:
Triode dc-PECVD for CNT emitter fabrication, Si wafer, Argon gas for annealing, and a diode setup in vacuum for field emission measurements.
4：Experimental Procedures and Operational Workflow:
The CNT emitters were subjected to electrical aging for about 8 hours at constant voltage mode. The field emission measurements were carried out in a vacuum with a gap of 230 μm between the cathode and anode.
5：Data Analysis Methods:
The electron emission current was measured before and after electrical aging to evaluate the improvement in field emission properties.
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