研究目的
Investigating the effects of deposition parameters on the homoepitaxial growth rate of microcrystalline diamond powders synthesized by HFCVD method.
研究成果
A higher substrate temperature (900 °C) and a relatively lower bias current (1 A) can provide a reasonable growth rate of 0.9 μm/h while inhibiting the formation of twined- or polycrystals. However, the wide range of particle sizes necessitates post-process sieving for commercial applications.
研究不足
The final improved powders have a wide range of particle sizes, requiring post-process sieving to meet commercial standards. The non-homogeneous deposited environment leads to variations in growth rates among crystals.
1:Experimental Design and Method Selection:
The study involves regrowing conventional diamond powders using HFCVD technique, focusing on the impact of carbon concentration, substrate temperature, and bias current on growth rate.
2:Sample Selection and Data Sources:
Conventional diamond powders (~1 μm) produced from crushing HPHT diamonds are used as seeds.
3:List of Experimental Equipment and Materials:
HFCVD apparatus with a deposition area of 1000 mm2, mixture of acetone and hydrogen as reactant gas, tantalum wires as hot filaments.
4:Experimental Procedures and Operational Workflow:
Seeds are dispersed onto a silicon wafer, and CVD microcrystalline diamonds are deposited under varying conditions.
5:Data Analysis Methods:
Surface morphologies are characterized by FESEM, and grain sizes are measured and fitted with a Gaussian curve.
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