研究目的
To provide detailed, step-by-step procedures for the fabrication of glass-based micro?uidic devices, including device design, photomask generation, photolithography, channel etching, and high-temperature bonding.
研究成果
The chapter successfully outlines a comprehensive method for fabricating glass-based micro?uidic devices, emphasizing safety precautions, especially when handling HF. The method is robust, with a high success rate in bonding microchips, and is adaptable to different types of glass substrates.
研究不足
The use of hydrofluoric acid (HF) poses significant safety risks, requiring strict safety protocols. The etching solution's effectiveness decreases over time, necessitating replacement. The annealing temperature varies slightly depending on the glass composition, requiring careful control.
1：Experimental Design and Method Selection:
Detailed procedures for fabricating glass-based micro?uidic devices.
2：Sample Selection and Data Sources:
Use of borosilicate and soda-lime glasses as substrate materials.
3：List of Experimental Equipment and Materials:
Includes UV flood exposure system, photoresist spinner, surface profiler, sonicator bath, and programmable high-temperature oven among others.
4：Experimental Procedures and Operational Workflow:
Step-by-step description from glass slide coating to microchip bonding.
5：Data Analysis Methods:
Measurement of channel dimensions during the etching process using a stylus-based surface profiler.
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Radiometer/photometer
Model IL1400A
International Light
Measurement of UV output power
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UV flood exposure system
OAI
San Jose, CA
Exposure of photoresist-covered substrate to UV light
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Photoresist spinner
Model WS-400A-6NPP/LITE
Laurell
Coating microscope slides with photoresist
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Surface profiler
KLA-Tencor
Measurement of channel dimensions during etching
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Sonicator bath
3510 Ultrasonic Cleaner
Branson
Cleaning of slides
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Dicing saw
Model EC-400
MTI Corp.
Dicing of glass plates into individual chips
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Air knife
Standard Air Knife
Exair
Drying of chips
-
Drying oven
Isotemp Vacuum Oven Model 280A
Fisher Scientific
Drying of chips
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Programmable high-temperature oven
Copper 120V small annealer
Evenheat
Annealing of microchips
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Stirring plates
Isotemp Stirring Hotplate
Fisher Scientific
Stirring of solutions
-
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