研究目的
Developing a Surface Plasmon Resonance (SPR) element with sub-micron periodicity grating structure for biochemical nanosensor applications.
研究成果
The nano-imprint lithography technique and hybrid polymer precursor are effective for fabricating submicron grating structures capable of exciting SPR waves, useful for biochemical nanosensors. Experimental results align well with RCWA simulations.
研究不足
The study focuses on the zero-order diffraction beam and does not extensively explore higher-order diffraction beams. The fabrication process requires precise control over the nano-imprint lithography technique.
1：Experimental Design and Method Selection:
The study involved the fabrication of a sub-micron periodicity grating structure using nano-imprint lithography from organically modified siloxane hybrid polymers, followed by characterization of its SPR properties.
2：Sample Selection and Data Sources:
The polymer precursor was prepared from 3-(Trimethoxysilyl) propyl methacrylate 98% (TMSPMA, Aldrich) monomer.
3：List of Experimental Equipment and Materials:
Silicon stamp, UV-curing setup, tungsten lamp, slit and pin holes, polarisator, CCD based spectrophotometer.
4：Experimental Procedures and Operational Workflow:
The polymer precursor was poured over a silicon stamp, underwent a vacuum process, UV-cured, and then covered with a thin gold layer. Reflectance spectra were measured using a setup with a tungsten lamp and spectrophotometer.
5：Data Analysis Methods:
Reflectance spectra were analyzed and compared with simulations using the Rigorous Coupled-Wave Analysis (RCWA) method.
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