研究目的
To analyze the interface structure between Sn-Ti alloy and quartz glass, and verify the reliability of the seal.
研究成果
The interface between Sn-Ti alloy and quartz glass is continuous and dense with a nano-layered-structure, consisting of a TiO2 layer near the Sn-Ti alloy and a multiphase layer near the quartz glass composed of TiSi2, Ti5Si3, and TiO2. This structure ensures a reliable hermetic seal.
研究不足
The study focuses on the interface structure between Sn-Ti alloy and quartz glass, but does not explore the mechanical properties or long-term stability of the seal under operational conditions.
1：Experimental Design and Method Selection:
The interface structure between Sn-Ti alloy and quartz glass was investigated by transmission electron microscope (TEM).
2：Sample Selection and Data Sources:
Quartz glass with surface roughness less than
3：5 nm and SiO2 content of more than 99 wt% was used. Sn-Ti alloy slice with a thickness of about 2 mm and Ti content less than 6% was prepared. List of Experimental Equipment and Materials:
Transmission electron microscope (JEOL JEM-2010 UHR), vacuum brazing furnace, FIB with a microsampling system (Hitachi FE-2100).
4：0). Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: Sn-Ti alloy slice was cut into disk, held between two pieces of quartz glass, heated to 800°C for 10 min in a vacuum brazing furnace, and then cooled to room temperature.
5：Data Analysis Methods:
Nano scale EDS mapping and HRTEM images were used to analyze the interface structure.
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