研究目的
To develop a methodology for the fabrication of photopatterned carbon films based on SU-8 deposited on transparent fused silica substrates, addressing the issues of cracking and poor adhesion of the pyrolyzed photoresist films (PPF) to common transparent substrates suitable for pyrolysis.
研究成果
The study concludes that SU-8 3035 is more suitable for the fabrication of crack-free and adherent carbon microstructures on transparent fused silica substrates compared to SU-8 2035. The produced material exhibits desirable properties such as low electrical resistivity, hydrophilic contact angle, and good adhesion, making it attractive for applications requiring optical transparency.
研究不足
The methodology has shown limitations with SU-8 2035, resulting in fractured and detached carbon microstructures, whereas SU-8 3035 produced crack-free and well-adhered structures. The adhesion strength to the substrate before pyrolysis may influence the success of the fabrication.
1：Experimental Design and Method Selection:
The methodology involves the fabrication of carbon microstructures from SU-8 2035 and SU-8 3035 photoresists on fused silica substrates, followed by pyrolysis.
2：Sample Selection and Data Sources:
Fused silica substrates were used due to their optical transparency and high melting point. SU-8 2035 and SU-8 3035 photoresists were selected for their photo-patternability and suitability for microstructure fabrication.
3：List of Experimental Equipment and Materials:
A quartz tube furnace for pyrolysis, a mask-less photolithography system for patterning, and various materials including SU-8 photoresists and fused silica substrates.
4：Experimental Procedures and Operational Workflow:
The process includes substrate preparation, photoresist coating, soft bake, photopatterning, post exposure bake, development, final bake, and pyrolysis under a nitrogen atmosphere.
5：Data Analysis Methods:
Measurements of electrical resistivity, inter-structure electrical resistance, contact angle, Raman spectrum, and adhesion strength were performed to characterize the produced carbon microstructures.
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