摘要： There is a recent interest in semiconducting superlattice films because their low dimensionality can increase the thermal power and phonon scattering at the interface in superlattice films. However, experimental studies in all cross-plane thermoelectric (TE) properties, including thermal conductivity, Seebeck coefficient, and electrical conductivity, has not been performed from these semiconducting superlattice films, because of substantial difficulties in the direct measurement of the Seebeck coefficient and electrical conductivity. Unlike the conventional measurement method, we present technique using a structure of sandwiched superlattice films between two embedded heaters as heating source, and electrodes with two Cu plates, which directly enables the investigation of the Seebeck coefficient and electrical conductivity across the Al2O3/ZnO superlattice films, prepared by atomic layer deposition (ALD) method. Used in combination with the promising cross-plane four-point-probe 3-ω method, our measurements and analysis demonstrate all cross-plane TE properties of Al2O3/ZnO superlattice films in the temperature range from 80 to 500 K. Our experimental methodology and the obtaining results represent a significant advancement in the understating of phonon and electrical transports in nanostructured materials, especially in semiconducting superlattice films in various temperature ranges.