研究目的
To refine the growth approach to obtain monolayer 1T WS2 up to 80 μm in size based on chemical vapor deposition and to explore its potential applications in electronic devices.
研究成果
The study successfully refined the growth approach to obtain large and pure 1T WS2 monolayers, demonstrating their stability and potential for applications in electronic devices. The findings provide a new pathway for the synthesis of 1T phase TMD materials.
研究不足
The technical and application constraints include the need for precise control over growth conditions and the potential for phase instability under certain conditions.
1:Experimental Design and Method Selection:
The growth of 1T WS2 was achieved using a low-pressure CVD process with synergistic catalysts (iron oxide and sodium chloride).
2:Sample Selection and Data Sources:
Polished Sapphire substrates were used for the growth.
3:List of Experimental Equipment and Materials:
A single-zone, 12-in. horizontal clam-shell tube furnace equipped with a 1-in.-diameter quartz tube, tungsten(VI) oxide (WO3), elemental sulfur powder, NaCl, Fe3O4 powder.
4:Experimental Procedures and Operational Workflow:
The growth involved mixing WO3 with Fe3O4, placing it close to the growth substrate, and introducing NaCl and sulfur powder at carefully adjusted locations. The growth was carried out at 850 °C for 20 min.
5:Data Analysis Methods:
Micro-XPS, AFM, Raman spectroscopy, and STEM were used for characterization.
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