研究目的
Investigating the thermal modulation of terahertz (THz) waves transmitting through 5 nm wide slot antennas via controlled thermal expansion of metals without active materials.
研究成果
The study demonstrates significant modulation of THz waves through 5 nm wide air-filled slot antennas by thermal expansion of metals, without the need for active materials. The extreme aspect ratio of the slot antennas enables considerable changes in the gap width, leading to measurable modulation in amplitude and resonant frequency. The findings suggest new possibilities for thermally active metallic nanostructures in various applications.
研究不足
The study is limited by the permanent deformation of metallic slot antennas at temperatures exceeding 150 °C, which affects the reversibility of thermal modulation. The small thermal expansion coefficients of metals also limit the modulation depth.
1：Experimental Design and Method Selection:
The study utilizes atomic layer lithography to fabricate 5 nm wide slot antennas on a glass substrate, followed by ion milling and chemical etching to create air-filled gaps. THz time-domain spectroscopy (THz-TDS) is used to measure the transmission spectra at different temperatures.
2：Sample Selection and Data Sources:
The samples are 220 nm thick Cr/Ag layer slot antennas with 5 nm wide air-filled gaps. The data is collected through THz-TDS measurements at varying temperatures.
3：List of Experimental Equipment and Materials:
A homemade THz-TDS setup, atomic layer deposition (ALD) for Al2O3 spacer, e-beam evaporator for Cr/Ag deposition, and COMSOL software for simulation.
4：Experimental Procedures and Operational Workflow:
The fabrication involves depositing Cr/Ag layers, ALD of Al2O3 spacer, peeling off the top Ag layer, ion milling to remove debris, and chemical etching to create air-filled gaps. THz transmission is measured at different temperatures.
5：Data Analysis Methods:
The data is analyzed using COMSOL simulation and coupled-mode method (CMM) calculation to understand the thermal expansion effects on the gap width and resonant features.
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