研究目的
To demonstrate a low loss silicon photonic optical interposer with negative taper silicon nitride waveguide couplers, capable of coherently coupling light into 100 PIC dies with equal power and phase with coupling loss less than 1 dB at 1550nm.
研究成果
The paper demonstrates a low loss silicon photonic optical interposer with negative taper silicon nitride waveguide couplers, achieving coupling loss less than 1 dB at 1550nm. This supports ±2μm misalignment tolerance at 2 dB loss point.
研究不足
The polymer waveguides have inferior reliability and temperature tolerance. Grating couplers typically have high loss (>2 dB) and narrow spectral bandwidth.
1：Experimental Design and Method Selection:
The WSOI is fabricated by combining contact lithography and projection lithography to achieve high resolution and wafer-scale definition of waveguides.
2：Sample Selection and Data Sources:
The WSOI realized on a 150 mm diameter silicon wafer consists of a 100 nm silicon nitride waveguide core on a 6 μm silicon dioxide lower cladding and with a 200 nm silicon dioxide upper cladding.
3：List of Experimental Equipment and Materials:
The waveguide core width is 3 μm and bending radius is 500 μm.
4：Experimental Procedures and Operational Workflow:
The path section is patterned by the contact lithography for large exposure region first and subsequently dry etched. The equal power splitters and the evanescent couplers are patterned by projection lithography and etched.
5：Data Analysis Methods:
The coupling loss is measured and calculated from the total transmission loss from the OI to PIC and back to OI.
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