研究目的
Investigating the synthesis and electrochromic properties of molybdenum oxide films prepared by pulse DC sputtering.
研究成果
MoOx films were deposited on an ITO/glass substrate at various oxygen flow rates using a pulsed magnetron sputtering deposition system. The morphology of the films became finer as the oxygen flow rate increased. Films with an MoO3 phase, as revealed by XRD, exhibited electrochromic properties. The maximum optical modulations of coatings that were formed at an oxygen flow rate of 25 sccm were 19.2 % at 400 nm, 36.2 % at 550 nm, and 41.7 % at 800 nm. Bleached MoOx films with a high percentage of Mo6+ exhibited favorable electrochromic properties.
研究不足
The technical and application constraints of the experiments include the pumping limitation of the system used, which required increasing the working pressure to form coatings at a high oxygen flow rate.
1：Experimental Design and Method Selection:
MoOx thin films were deposited on indium tin oxide (ITO)-coated glass using a pure Mo target by a pulse magnetron sputtering deposition system. The argon flow rate was held at a constant 30 sccm and the oxygen flow rates varied from 1 to 30 sccm.
2：Sample Selection and Data Sources:
The effects of the oxygen flow rate on the growth and microstructure of the molybdenum oxide films were examined using X-ray diffractometry (XRD), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS).
3：List of Experimental Equipment and Materials:
Pulse magnetron sputtering deposition system, X-ray diffractometry (XRD, PANalytical X’Pert PRO MRD), X-ray photoelectron spectroscopy (XPS, Kratos Axis Ultra DLD), scanning electron microscope (SEM, JEOL JSM-7000F), UV-visible spectrometer (Jasco V-570).
4：0). Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The working pressure was carefully maintained at
5：67 Pa using a floating gate valve. The transformations of the crystalline phase, chemical composition, and microstructure of the MoOx films were analyzed. Data Analysis Methods:
The optical density and modulation of the MoOx films were analyzed. Electrochromic tests were conducted using an electrochemical analyzer.
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