研究目的
Developing a fabrication process for ellipsoidal mirrors for nanofocusing soft X-rays.
研究成果
The study successfully developed a fabrication process for ellipsoidal mirrors for soft X-ray nanofocusing, achieving a focal spot size of less than 250 nm at 300 eV. The process shows promise for fabricating X-ray mirrors with forms of a solid of revolution, including Wolter mirrors. Future improvements in accuracy could enable ideal ellipsoidal mirrors with focal spot sizes of less than 100 nm.
研究不足
The study only used a part of the ellipsoidal mirror surface due to fabrication challenges. The entire mirror surface could not yet be fabricated precisely, limiting the focusing performance assessment to partial illumination conditions.
1：Experimental Design and Method Selection:
The study involved a two-stage process consisting of mandrel fabrication and replication. The mandrel fabrication employed a deterministic figure correction method using elastic emission machining (EEM) and a surface profiler using laser probes. The replication was based on electroforming.
2：Sample Selection and Data Sources:
The material of the mandrel was selected to be quartz glass for its isotropic structure. The ellipsoidal mirror was assessed under partial illumination conditions at the soft X-ray beamline (BL25SU) of SPring-
3：List of Experimental Equipment and Materials:
Equipment included a nozzle-type EEM apparatus, a surface profiler with laser probes, and an electrodeposition system. Materials included quartz glass for the mandrel and nickel (Ni) for the electroformed mirror.
4：Experimental Procedures and Operational Workflow:
The mandrel surface was roughly formed by conventional grinding and polishing, then finished using EEM. The ellipsoidal mirror was fabricated by replicating the mandrel through Ni electroforming.
5：Data Analysis Methods:
The focusing performance was assessed by measuring the intensity profile of the focused beam using the knife edge scanning method and analyzing the wavefront error.
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