研究目的
To develop a global model for He+Air CAPs to study the effect of air impurities on plasma composition and power dissipation, and to propose a simplified chemistry model for easier integration into multidimensional fluid models.
研究成果
The study successfully develops a global model for He+Air CAPs, revealing significant changes in plasma composition with varying air concentrations. A simplified chemistry model is proposed, maintaining accuracy while reducing computational complexity, facilitating future integration into more detailed fluid models.
研究不足
The model is a zero-dimensional global model, which may not capture all spatial and temporal dynamics of the plasma. The simplified chemistry model, while reducing computational load, may introduce errors up to a factor of 2 in some species densities.
1:Experimental Design and Method Selection:
The study uses a global model incorporating 59 species and 866 volume reactions, with a new boundary condition for mass transport at the plasma-air interface. The model is solved using COMSOL chemical engineering module.
2:Sample Selection and Data Sources:
The plasma system consists of two parallel circular plates with a gap of 2 mm, excited with an average power density of 10 W/cm3, at room temperature (300 K), and a gas flow rate of 100 sccm. Air concentration in the feedstock gas is varied from 100 to 10000 ppm.
3:List of Experimental Equipment and Materials:
The model includes species such as He, He*, He2*, He+, He2+, HeH+, O2, N2, H2O, and their reactions.
4:Experimental Procedures and Operational Workflow:
The model calculates the densities of reactive species and power dissipation as a function of air concentration. The electron temperature and densities of species are solved by integrating the particle balance and electron energy balance equations.
5:Data Analysis Methods:
The simulation results are analyzed to identify key species and chemical pathways, leading to the development of a simplified chemistry model with 47 species and 109 reactions.
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