研究目的
To fabricate highly (111)-oriented nanotwinned gold films via electroplating and apply them in direct bonding for 3D-IC development, leveraging the fast surface diffusion of the (111) plane of gold to enhance bonding quality.
研究成果
Highly (111)-oriented nanotwinned gold films were successfully fabricated and bonded at low temperatures, showing grain growth across interfaces and potential bonding strengths exceeding 40.8 MPa. The fast surface diffusion of the (111) plane significantly aids in the bonding process.
研究不足
The study is limited by the surface roughness of the gold films, which may affect bonding strength. The true bonding strength might be higher than the tested maximum due to film-substrate separation or silicon substrate cracking during shear tests.
1：Experimental Design and Method Selection:
Electroplating using periodical-reverse method with specific current densities to fabricate nanotwinned gold films with (111)-preferred orientation.
2：Sample Selection and Data Sources:
Silicon oxide wafers with sputtered titanium and gold layers as seed layers for electroplating.
3：List of Experimental Equipment and Materials:
Platinum-titanium mesh anode, Keithley 2601A source meter, Tanaka MICROFAB Au100 electroplating bath, vacuum oven, SAT, EBSD, FIB, STEM, AFM, bond tester.
4：Experimental Procedures and Operational Workflow:
Cleaning substrates, electroplating with varying on-off time ratios, bonding at 250°C under vacuum, shear testing, and microstructure analysis.
5：Data Analysis Methods:
XRD and EBSD for orientation and grain size analysis, STEM for twin spacing, AFM for surface roughness, shear tests for bonding strength.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容-
Keithley 2601A
2601A
Keithley
Source meter for electroplating
-
Bruker D2
D2
Bruker
X-ray diffraction analysis
-
JEOL JSM-7800F
JSM-7800F
JEOL
Electron back-scattering diffraction analysis
-
JEOL JEM-F200
JEM-F200
JEOL
Scanning transmission electron microscopy
-
Hitachi FS300II
FS300II
Hitachi
Scanning acoustic tomography
-
MICROFAB Au100
Au100
Tanaka
Electroplating bath
-
Tescan Gaia3
Gaia3
Tescan
Focused ion beam observation
-
Innova AFM
AFM
Innova
Atomic force microscopy for surface roughness
-
Dage 4000 bondtester
4000
Dage
Shear testing
-
登录查看剩余7件设备及参数对照表
查看全部
