研究目的
To fabricate a hybrid thin film using polyimide (PI) and Polydimethylsiloxane (PDMS) that combines their advantages of transparency, thermal stability, and stretchability, and to achieve superhydrophobicity for applications in wearable devices and flexible hybrid electronics.
研究成果
The study successfully fabricated a hybrid thin film with superhydrophobic properties, achieving a water droplet contact angle of 179° and contact angle hysteresis of 10° with 77% transmittance. The fabrication process demonstrated control over pillar height and step size, offering potential applications in flexible hybrid electronics and wearable devices. Future research could explore the durability and scalability of the fabrication process.
研究不足
The study does not address the long-term durability of the superhydrophobic properties under various environmental conditions. Additionally, the fabrication process may require optimization for mass production.
1:Experimental Design and Method Selection:
The study employs a polymer casting method to fabricate a superhydrophobic substrate with micro pillars. The design rationale focuses on achieving high water droplet contact angles (WDCA) and low contact angle hysteresis (CAH) through the manipulation of pillar height and step size.
2:Sample Selection and Data Sources:
Samples are prepared using a master sheet (Si wafer) with vertically etched pillar structures. The samples are treated and coated with photoresist and polyimide solution to form thin films.
3:List of Experimental Equipment and Materials:
Equipment includes a deep reactive ion etching (DRIE) process setup, spin coater, contact aligner machine (MIADAS-60M), PECVD apparatus, and optical analysis equipment (LAMBDA 750S UV/Vis/NIR). Materials include Si wafer, photoresist AZ9260, developer AZ-300MIF, polyimide solution, and PDMS.
4:Experimental Procedures and Operational Workflow:
The process involves etching pillar structures on a Si wafer, treating with O2 plasma, spin coating with photoresist, photolithographically defining pillar patterns, depositing SiO2 as a sacrificial layer, spin coating with polyimide solution, baking, and etching the sacrificial layer to release the superhydrophobic PI substrate.
5:Data Analysis Methods:
The study measures static water droplet contact angles and contact angle hysteresis to evaluate superhydrophobicity. Optical analysis is used to assess transparency.
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