研究目的
To design, fabricate, and test piezoelectric energy harvesters using ZnO nanowires on elastic interdigitated electrodes for harvesting energy from low frequency mechanical vibrations.
研究成果
The proposed piezoelectric energy harvester using ZnO nanowires on elastic interdigitated electrodes successfully converts low frequency mechanical vibration into electrical energy without resonant methods. The cantilever array structure improved output voltage and power due to increased flexibility and deformable area. Future work should focus on optimizing electrode design and proof mass to enhance power conversion efficiency.
研究不足
The measured output power is relatively small (pW range) due to low acceleration (0.5 g). Mechanical reliability issues may arise from contact between proof mass and electrodes. The guiding jig has surface friction and low restitution force, which could reduce efficiency. Further optimization of electrode gap, suspended height, and use of flexible substrates or cylindrical proof mass is needed.
1：Experimental Design and Method Selection:
The design involves interdigitated elastic electrodes made of electroplated Ni with suspended parts, a spherical Ni proof mass, and selectively grown ZnO nanowires. The method uses piezoelectric transduction to convert mechanical vibration into electrical energy without resonant motion or frequency up-conversion.
2：Sample Selection and Data Sources:
Fabricated energy harvesters with two electrode structures (simple suspended part and cantilever array) were tested. Data were collected from measurements using a vibration exciter.
3：List of Experimental Equipment and Materials:
Equipment includes a vibration exciter (Bruel and Kj?r LDS V406), function generator, power amplifier, digital oscilloscope, electroplating setup, sputtering system, and SEM. Materials include Pyrex glass substrate, Ni for electrodes and proof mass, ZnO seed layer, photoresist, HF solution, zinc nitrate hexahydrate, hexamethylenetetramine, and acrylic for jig.
4：Experimental Procedures and Operational Workflow:
Fabrication steps: electroplate Ni electrodes, etch glass substrate to create suspended parts, pattern ZnO seed layer using lift-off, sputter and anneal seed layer, grow ZnO nanowires hydrothermally. Testing: mount device on vibration exciter, apply 6 Hz sinusoidal vibration with 0.5 g acceleration, measure output voltage and power with oscilloscope and resistive loads.
5：5 g acceleration, measure output voltage and power with oscilloscope and resistive loads.
Data Analysis Methods:
5. Data Analysis Methods: Output voltage waveforms were recorded, and average power was calculated using P = V_rms^2 / R, where V_rms is the root mean square voltage and R is the load resistance.
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