研究目的
To fabricate nanohole arrays of various depths using aluminum anodic oxidation and investigate their structural colors based on Bragg's Law, including the realization of multiple colors on a single substrate.
研究成果
The study successfully fabricated nanohole arrays with various depths using a simple anodic oxidation process, demonstrating that structural colors can be controlled primarily by depth changes as per Bragg's Law. Colors ranged across the visible spectrum and repeated every approximately 250 nm. Fabrication of multiple depths on a single substrate showed potential for applications in displays and anti-counterfeiting. Future work could optimize uniformity and explore broader applications.
研究不足
The use of phosphoric acid electrolyte may lead to non-uniform nanohole arrays and require high voltages. The process is limited to small areas and may have issues with reproducibility and scalability for large-scale applications. Color saturation decreases with increasing depth due to scattering effects.
1：Experimental Design and Method Selection:
The study used aluminum anodic oxidation with phosphoric acid electrolyte to fabricate nanohole arrays, leveraging self-aligning characteristics and Bragg's Law for color prediction. Methods included sputtering, anodic oxidation, etching, and photolithography.
2：Sample Selection and Data Sources:
High-purity aluminum deposited on silicon wafers was used as substrates. Samples were fabricated with varying depths from 265 nm to 670 nm.
3：List of Experimental Equipment and Materials:
Laboratory-fabricated processing equipment with power supply and cooling plate, radiofrequency magnetron sputtering system, phosphoric acid electrolyte, chromic acid mixture for etching, AZ GXR-601 photoresist, AZ-400K developer, UV exposure unit, acetone, methanol, deionized water, and field-emission scanning electron microscopy (FE-SEM) for characterization.
4：Experimental Procedures and Operational Workflow:
Steps included aluminum deposition, primary anodic oxidation, oxide removal, secondary anodic oxidation, widening process, photoresist coating, UV exposure, development, third anodic oxidation for patterned areas, photoresist removal, washing, and aluminum coating. Depths were controlled by varying voltage application times.
5：Data Analysis Methods:
Colors were analyzed using RGB values and converted to CIE 1931 chromaticity coordinates. FE-SEM images were used to measure nanohole dimensions, and Bragg's Law equations were applied for theoretical predictions.
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