研究目的
To investigate the effect of gas mixing ratio (Ar:O2) on the structural characteristics of titanium dioxide nanostructures synthesized by DC reactive magnetron sputtering.
研究成果
High-quality and pure TiO2 nanostructures with dominant anatase phase were successfully synthesized using optimized magnetron sputtering parameters. The gas mixing ratio significantly influences structural characteristics, such as phase composition and surface roughness, making it a critical parameter for controlling film properties for applications in optoelectronics and photocatalysis.
研究不足
The study focused only on two gas mixing ratios (10:10 and 20:10) for detailed analysis, potentially limiting the generalizability to other ratios. The use of a homemade sputtering system may introduce variability compared to commercial systems. Characterization was limited to structural properties; optical or photocatalytic properties were not extensively discussed.
1：Experimental Design and Method Selection:
A homemade dc closed-field unbalanced reactive magnetron sputtering system was used to synthesize TiO2 nanostructures. The operation parameters were optimized, including gas mixing ratios, inter-electrode distance, and deposition time.
2：Sample Selection and Data Sources:
Glass substrates were used for thin film deposition. Five different Ar:O2 gas mixing ratios (10:10, 20:10, 40:10, 50:10, 66:10) were employed, with results presented for 10:10 and 20:
3：List of Experimental Equipment and Materials:
Equipment includes a dc power supply (max 150 W, 3 kV, 50 mA), stainless steel electrodes (8 cm diameter, 4 mm thickness), titanium target (
4：99% purity), Edward double-stage rotary pump (suction power 8 m3/hr), gas mixer, and characterization tools (XRD, SEM, EDX, AFM, FTIR). Materials include argon and oxygen gases, and glass substrates. Experimental Procedures and Operational Workflow:
The chamber was evacuated to a base pressure of about 3e-2 mbar, total gas pressure maintained at 7e-2 mbar. Gas mixing ratios were controlled, and films were deposited for 4 hours. Samples were characterized using XRD, AFM, and FTIR.
5：Data Analysis Methods:
XRD data analyzed using Debye-Scherer's equation for crystallite size and weight fraction equations for phase composition. FTIR spectra analyzed for bond identification, and AFM for surface roughness.
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