研究目的
To study porous silicon precipitated with nickel for the sensitive layer of a gas sensor, focusing on its preparation, properties, and sensitivity to isopropanol vapor.
研究成果
The modified porous silicon with nickel exhibits higher sensitivity to isopropanol vapor for samples prepared with higher anodic current density (20 mA/cm2), as shown by impedance spectroscopy. The material shows ferromagnetic properties due to nickel particles, and the equivalent electrical circuit model effectively describes the sensor behavior. This approach has high applicability for gas sensor development.
研究不足
The study is limited to isopropanol vapor sensitivity; other gases were not tested. The sample size is small (12 samples), and the methods may have optimization potential for broader applications. The magnetic measurements show low saturation magnetization, indicating limited nickel precipitation.
1：Experimental Design and Method Selection:
The study involves modifying porous silicon with nickel using electroless and electrochemical deposition methods, followed by characterization of morphology, chemical composition, magnetic properties, and electrical sensitivity to isopropanol vapor.
2：Sample Selection and Data Sources:
Twelve samples were prepared from boron-doped monocrystalline silicon wafers, with variations in anodic current density (2 mA/cm2 and 20 mA/cm2) and nickel deposition methods and times.
3：List of Experimental Equipment and Materials:
Equipment includes scanning electron microscope (Hitachi SU3500), atomic force microscope (Bruker Multimode 8 AFM), SEM-EDS (Hitachi SU3500 SEM), impedancemeter (Ellins Z-1500), SQUID magnetometer (Quantum Design MPMS XL), and software like EIS Spectrum Analyser. Materials include silicon wafers, hydrofluoric acid, isopropyl alcohol, nickel chloride solution, and conductive paste.
4：Experimental Procedures and Operational Workflow:
Samples were prepared by electrochemical etching of silicon wafers, followed by nickel deposition. Surface morphology was analyzed using SEM and AFM, chemical composition via SEM-EDS, magnetic properties with SQUID, and electrical sensitivity using electrochemical impedance spectroscopy in air and isopropanol vapor at 300°C.
5：Data Analysis Methods:
Data were analyzed using network analysis for electrical circuits, equivalent circuit modeling with EIS Spectrum Analyser software, and interpretation of magnetic hysteresis and saturation magnetization.
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