研究目的
To develop a multilayer thin film structure with alternate layers of carbon nanotubes and nickel for efficient thin film temperature gauges, and to study its properties for sensing applications.
研究成果
The multilayer films with alternate CNT and Ni layers showed increased sensitivity and initial resistance, making them suitable for thin film temperature gauges. Despite a decrease in TCR and electron mobility, the films can detect lower heat fluxes more accurately. Future work should investigate the critical number of layers and optimize the structure for practical applications.
研究不足
The study was limited by the maximum temperature of 200°C for TCR measurements due to instrument constraints. Adhesion issues with non-porous substrates and DLC:Ni restricted the multilayer structure to porous-Si only. The quality of CNT was compromised when using electrodeposited Ni compared to DLC:Ni. The optimal number of layers and long-term stability were not fully explored.
1：Experimental Design and Method Selection:
The study used a combination of low-pressure chemical vapor deposition (CVD) for CNT synthesis and electrodeposition for Ni film deposition. Porous-Si substrates were chosen to enhance adhesion.
2：Sample Selection and Data Sources:
Substrates included polished p-type Si, unpolished p-type Si, DLC:Ni, and porous-Si. Samples were cut into 5 mm × 5 mm pieces.
3：List of Experimental Equipment and Materials:
Equipment included a CVD system, electrodeposition setup, SEM (FEI-Helios 600), Raman spectrometer (LabRam HR), XPS/XAES system (Axis Ultra DLD), and van der Pauw setup. Materials included Si substrates, NiSO4·6H2O, NiCl2·6H2O, boric acid, acetylene, argon, etc.
4：Experimental Procedures and Operational Workflow:
Substrates were prepared by cleaning and etching. Ni films were electrodeposited using a Watts bath. CNT films were grown via CVD with acetylene and argon. Characterization involved SEM, Raman, XPS, XAES, and electrical measurements.
5：Data Analysis Methods:
Data were analyzed using software like Kratos-Vision for XPS, and resistance and TCR were calculated from van der Pauw measurements.
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