1：Experimental Design and Method Selection:

The study involved growing ZnO thin films on glass substrates using thermal evaporation of zinc powder in vacuum, followed by heat treatment in air at temperatures between 450 and 600°C for 1 to 3 hours. The films were characterized using x-ray diffraction (XRD), Raman scattering, and scanning electron microscopy (SEM) to analyze structural changes and defects.

2：Sample Selection and Data Sources:

Glass slides were used as substrates, cleaned with HCl, methanol, and distilled water. Zinc powder of 99.995% purity from Sigma Aldrich was evaporated. Samples included as-deposited films and films heat-treated at various temperatures and times.

3：995% purity from Sigma Aldrich was evaporated. Samples included as-deposited films and films heat-treated at various temperatures and times. List of Experimental Equipment and Materials:

3. List of Experimental Equipment and Materials: Equipment included a vacuum evaporation unit (PVD-HANDY/25-TE by VAKSIS), Bruker D8 Advance diffractometer for XRD, Renishaw 250 mm focal length in Via Spectrometer for Raman measurements, and Zeiss EVO LS 10 SEM. Materials included zinc powder (Sigma Aldrich-324930), glass slides, HCl, methanol, and distilled water.

4：Experimental Procedures and Operational Workflow:

Zinc powder was evaporated in a tungsten boat under vacuum (pressure ~10^-5 Torr) with a current of 70 A. Films were deposited on glass substrates at specific geometries. Post-deposition, films were heat-treated in air at 450-600°C for 1-3 hours. XRD, Raman, and SEM analyses were performed on as-deposited and heat-treated samples.

5：Data Analysis Methods:

XRD peaks were fitted with Lorentzian functions and polynomial backgrounds to determine peak positions and FWHM. Raman spectra were analyzed for shifts and new peaks. SEM images were examined for morphological changes. Strain and grain size were calculated using XRD data and Scherrer's equation.