研究目的
To design, fabricate, and characterize infrared metamaterial perfect absorbers using dispersive dielectric spacers, specifically silicon nitride, to achieve perfect absorption and explore their advantages over non-dispersive spacers.
研究成果
The use of dispersive silicon nitride spacers in MPAs enables dual absorption peaks, shared resonant modes, reduced sensitivity to structural variations, and high-quality factor absorption, demonstrating potential for advanced functional devices in infrared applications.
研究不足
Inaccuracies in permittivity extraction from FTIR measurements, fabrication variations affecting geometry, and the need for high-order expansions in RCWA for accuracy. The study is limited to infrared wavelengths and specific materials (SiNx and gold).
1：Experimental Design and Method Selection:
The study employs a semi-analytical rigorous coupled wave analysis (RCWA) method for designing MPAs, finite difference time domain (FDTD) simulation for validation, and Fourier transform infrared (FTIR) spectroscopy for characterization. The design aims for perfect absorption in the 8-9 μm wavelength range.
2：Sample Selection and Data Sources:
Low-stress silicon nitride thin films deposited via low-pressure chemical vapor deposition (LPCVD) on silicon wafers are used. Samples include free-standing SiNx films and fabricated MPA structures with varying geometries.
3：List of Experimental Equipment and Materials:
FTIR spectrometer (Vertex 70V, Bruker) with infrared microscope (Hyperion 1000, Bruker), photolithography equipment for fabrication, gold and silicon nitride materials.
4：Experimental Procedures and Operational Workflow:
Permittivity of SiNx is extracted from FTIR reflectance measurements. MPAs are fabricated using photolithography, metal deposition, and etching processes. Absorption spectra are measured using FTIR spectroscopy.
5：Data Analysis Methods:
Data is analyzed using RCWA and FDTD simulations, with effective medium theory for interpretation. Fitting procedures for permittivity extraction and comparison between experimental and simulated results are performed.
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