研究目的
To design and fabricate a biosensor based on two cascaded microrings on a polymer platform using the Vernier effect to improve the free spectral range (FSR) and sensitivity compared to single-microring biosensors.
研究成果
The fabricated two-cascaded-microrings biosensor on a polymer platform demonstrates a 16-fold improvement in FSR (4.6 nm) and sensitivity compared to single-microring biosensors, achieved through the Vernier effect and optimized fabrication with minimal residual layer. This approach is cost-effective and suitable for mass production, with high potential for biosensing applications.
研究不足
Deviations in fabrication may affect performance, but the use of a contact mask aligner minimizes radius variations. The bulk sensitivity was not experimentally explored in this study, relying on theoretical amplification from the Vernier effect.
1：Experimental Design and Method Selection:
The study employs the Vernier effect with cascaded microring resonators to enhance FSR and sensitivity. Theoretical analysis includes designing microrings with different radii to create a small FSR difference. Fabrication uses UV-based soft nanoimprint lithography (Soft UV NIL) with Ormocore polymer.
2：Sample Selection and Data Sources:
The device is fabricated on a Si wafer with a SiO2 under-cladding layer. Measurements are performed using a tunable laser and power meter at around 840 nm wavelength.
3：List of Experimental Equipment and Materials:
Equipment includes a Nova 600 Nanolab SEM/FIB machine, tunable laser, power meter, polarizer, lensed fibers, temperature-stabilized chuck. Materials include Ormocore, maT thinner, Ormoprime, SU8-2 photoresist, PFPE for soft mold, Irgacure 2022 photoinitiator, Fluorolink MD
4：Experimental Procedures and Operational Workflow:
7 Fabrication involves creating a master mold with SU8-2 using UV lithography, preparing a PFPE soft mold, spin-coating Ormocore diluted with maT thinner, imprinting with the soft mold, UV curing, and hard baking. Characterization involves SEM imaging and optical transmission measurements with data fitting using Lorentzian functions.
5：Data Analysis Methods:
A two-step fitting method is applied: single-peak fitting with Lorentzian functions and whole-envelope fitting to trace spectral shifts and determine FSR and sensitivity.
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Ormocore
Microresist Technology
Optical polymer material used for fabricating the waveguide and microring resonators in the biosensor.
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maT thinner
Microresist Technology
Used to dilute Ormocore for spin-coating to achieve the desired waveguide height and reduce viscosity.
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Ormoprime
Microresist Technology
Adhesion layer applied to the substrate before spin-coating Ormocore to improve adhesion.
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SU8-2
MicroChemicals
Negative photoresist used to fabricate the master mold for the soft imprint process.
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PFPE
Fluorolink MD 700
Solvay Solexis
Material used to create the soft mold for nanoimprint lithography, offering low surface energy and chemical resistance.
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Irgacure 2022
BASF
Photoinitiator used in the PFPE mixture for UV curing during soft mold preparation.
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Nova 600 Nanolab
SEM/FIB
Scanning electron microscope and focused ion beam machine used for characterizing the fabricated biosensor, including cross-section imaging.
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tunable laser
Used in the measurement setup to characterize the optical transmission spectrum of the biosensor.
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power meter
Used to measure the optical power output from the biosensor during characterization.
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polarizer
Placed between the laser and biosensor to ensure transverse-electric (TE) mode excitation.
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lensed fibers
Used to couple light into and out of the biosensor chip during optical measurements.
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temperature-stabilized chuck
Used to maintain a constant temperature during measurements to prevent spectrum shifts due to temperature variations.
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