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Physical and electrical properties of nitrogen-doped hydrogenated amorphous carbon films
摘要： Nitrogen-doped hydrogenated amorphous carbon films (a-C:H:N) have been prepared by a plasma-activated chemical vapor deposition technique (PACVD) by using a plasma beam source (PBS). The properties of the a-C:H:N films were changed by varying the total pressure, the substrate temperature (100 °C, 300 °C) and nitrogen partial pressure p(N2) by adding nitrogen to the precursor acetylene (C2H2). For the investigations, a-C:H:N films have been deposited onto glass slides and doped silicon wafers. The deposition rate decreased with increasing nitrogen content in the N2/C2H2 gas mixture and with decreasing total pressure. The elemental composition of two sample series (300 °C) has been analyzed with Elastic Recoil Detection Analysis (ERDA). The highest N content and N/C ratio was estimated to be 16 at.% and 0.25 at the highest p(N2), respectively. Microhardness measurements showed that the hardness decreased with increasing p(N2). Electrical resistance of the a-C:H:N films was measured by 4-point probe. Electrically conductive coatings have been obtained by nitrogen-doped a-C:H films at higher substrate temperature (300 °C). The electrical resistance of the a-C:H:N films also decreases with decreasing total pressure, with the lowest value being about 1 Ohm cm. The film density was determined by means of X-ray reflectometry (XRR).
关键词： PACVD,carbon nitride films,electrical conductivity,DLC,carbon films,XRR
更新于2025-09-23 15:22:29
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The influence of positive pulses on HiPIMS deposition of hard DLC coatings
摘要： Diamond-like carbon (DLC) coatings were deposited by a novel HiPIMS method that incorporates positive voltage pulses at the end of the conventional HiPIMS discharge. Different positive voltage amplitudes (100, 200, 300, 400 and 500 V) were used to evaluate the effect of this operation mode on the discharge process and the mechanical properties of the deposited DLC coatings. The application of positive pulses was observed to enhance the ionization of both the sputtered carbon and argon species. Mass spectroscopy measurements showed that a larger amount of high-energy C+ ions are generated, with ion energies proportional to the amplitude of the overshoot voltage. The ion bombardment induced by the positive pulses led to higher compressive residual stresses and densification of deposited DLC coatings. Moreover, their Raman spectra exhibited lower D-band and G-band intensity ratios (ID/IG) as the pulses voltage was increased which is indicative of higher sp3 content. Mechanical properties were evaluated by nanoindentation testing and the hardness of the deposited DLC films was observed to increase from 9.6 GPa (for no voltage pulse applied) to 22.5 GPa (for an applied positive pulse voltage of 500 V).
关键词： HiPIMS,Hard coatings,Diamond-like Carbon (DLC),Tribology
更新于2025-09-23 15:21:01
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Optical properties of diamond-like carbon films prepared by pulsed laser deposition onto 3D surface substrate
摘要： It is difficult to grow uniform film by pulsed laser deposition because the spatial distribution of the laser-induced plume is a forward-directed cone-shape. A 3D-motional deposition setup was founded, and the correlative mathematical model of the film thickness on the 3D curved surface was deduced. Based on simulation and optimization, the diamond-like carbon (DLC) film was grown onto the large curved silicon substrate. According to the infrared transmittance spectra, the optical constants of the DLC film samples at different regions on the curved substrate were similar, indicating that the DLC film prepared onto the curved surface was homogeneous. Meanwhile, the deviation of average transmittance in the medium infrared band was below 2.3%, which could improve the imaging performance of the infrared detection. This research is useful to expand the application of the pulsed laser deposition in the optical field.
关键词： uniform transmittance,Raman spectroscopy,3D curved surface,Pulsed laser deposition,DLC film,infrared spectrum
更新于2025-09-23 15:21:01
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Sub-micron structuring/texturing of diamond-like carbon-coated replication masters with a femtosecond laser
摘要： Diamond-like carbon (DLC) coatings have very attractive mechanical and tribological properties, i.e. high hardness, low friction and high wear resistance. Therefore, DLC is often used as a solid lubricant in moulds for injection moulding. Laser processing of DLC with ultrashort lasers, i.e. femtosecond lasers, can be performed both at micron and sub-micron scales, namely by producing laser-induced periodic surface structures (LIPSS). In this research, the effects of laser structuring/texturing on DLC properties are investigated. First, the laser-processing parameters were optimised to produce uniform LIPSS without damaging a thin DLC film and then the properties of the textured DLC-coated substrates were studied. It was determined that the tribological properties of the processed surfaces remained unchanged, but the hardness of the structured/textured DLC layers was reduced significantly. Although GAXRD and Raman spectroscopy did not show any significant crystallisation of the DLC coating after the laser irradiation, the analysis indicated that a thin graphitised layer had been formed on the surface as a result of the femtosecond laser processing.
关键词： Laser microprocessing,Femtosecond laser,LIPSS,Diamond-like carbon (DLC)
更新于2025-09-19 17:13:59
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Research of high-performance DLC Film on Si Substrate by Pulsed Laser Deposition
摘要： Femtosecond pulsed laser was used to deposit DLC films. Through methods of oxygen ambient and mixing silicon, no-hydrogen DLC films were deposited with more excellent transmission, hardness, adhesion and stability than those by chemical vapor deposition or traditional pulsed laser deposition (PLD). The transmission of 3~5μm band was larger than or equal to 91.7%, and the hardness up to 40~50GPa. All the films passed the tests of high temperature, low temperature, salt-fog and heavy-friction tests. The performances of the samples satisfied optical engineering need.
关键词： transmission,oxygen ambient,mixing silicon,femtosecond pulsed laser,hardness,DLC films
更新于2025-09-16 10:30:52
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Pure carbon conductive transparent electrodes synthetized by a full laser deposition and annealing process
摘要： One of the biggest challenge that face optoelectronic and photovoltaic devices is the necessity to provide a reliable alternative to transparent conducting oxide (TCO) like Indium Thin Oxide (ITO). We recently published a study proposing a method to produce transparent conductive electrodes only based on carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to produce high performance DLC. Those thin films own very interesting properties in kindship with diamond, like high transparency in the visible range, chemical inertness and biocompatibility. In addition, the DLC is a perfect electrical insulator and presents a relative high opacity in ultra-violet (UV). This particularity has a great interest to perform, in a second step, UV laser annealing over the DLC surface. The aim is to break the existing diamond bindings (sp3 hybridization) on the surface and allow atoms being reorganized in graphitic bindings (sp2 hybridization). We demonstrate that the increase of atomic graphitic bindings leads to a valuable surface conductivity. According to optimized annealing parameters, the surface conductivity reaches values comparable to ITO. We also show that the laser treatments only sparsely affects the DLC transparency. Moreover, this full laser-based process remains compatible with the standard microelectronic technological steps.
关键词： Diamond-Like Carbon (DLC),Graphitization,Pulsed Laser Deposition (PLD),Transparent electrodes,Laser surface annealing
更新于2025-09-12 10:27:22
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Tribological and adhesive properties of the tungsten-doped diamond-like carbon film prepared by double lasers deposition
摘要： The nanosecond and femtosecond lasers were used to ablate the graphite and tungsten targets simultaneously, and the tungsten-doped DLC ?lm with the di?erent tungsten concentration on the strip substrate was prepared. The content of the tungsten in the doped DLC ?lm varied continuously in the horizontal direction and was changeless in the vertical direction. The tungsten content in the doped DLC ?lm increased gradually when it was close to the center axis of the tungsten plasma generated by femtosecond laser. Surface roughness and the critical load of the tungsten-doped DLC ?lm increased with the increasing of tungsten content. On the other hand, the friction coe?cient of the tungsten-doped DLC ?lm decreased ?rstly and then increased when the tungsten content increased gradually. The minimal friction coe?cient was 0.086 when the tungsten content was about 8.07 at.%. The deposition method designed in this experiment also could be used for other doped ?lms in the ?eld of the function ?lms.
关键词： Continuously variated content,Critical load,Tungsten-doped DLC ?lm,Tribological property
更新于2025-09-11 14:15:04
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Characteristics of Diamond-Like Carbon Films Fabricated by Using a Filtered Vacuum Arc System for Dye-Sensitized Solar Cells
摘要： Dye-sensitized solar cells (DSSC) based on diamond-like carbon (DLC) anti-re?ection coating (ARC) thin ?lms are investigated. The DLC ?lm was proposed to improve the cell performance of DSSC devices. In this work, the DLC ?lms were fabricated by using the FVA (?ltered vacuum arc) method, the structural, optical, and physical properties of the fabricated DLC ?lms with various ?lm thicknesses were experimentally investigated. All DLC ?lms showed smoother and more uniform surfaces with increasing ?lm thickness. Furthermore, the values of rms surface roughness, friction coe?cient, the refractive index, and the absorption coe?cient increased with increasing ?lm thickness, the hardness and the elastic modulus of the DLC ?lms were improved. These results are associated with the increased sp3 contents in the amorphous carbon ?lm due to the e?ects of the energetic ion bombardment during ?lm deposition.
关键词： DLC,Filtered vacuum arc (FVA),Hardness,Anti-re?ection,Friction coe?cient,Power conversion e?ciency
更新于2025-09-11 14:15:04
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DLC deposition inside of a long tube by using the pulsed-DC PECVD process
摘要： In this study, the pulsed-DC PECVD deposition system was used to produce Diamond-like carbon (DLC) film on the internal surface of a long metal tube (200 cm in length and 10 cm in diameter) employed as the deposition chamber itself. Firstly, the features of plasma discharges and the temperature distribution along the tube external surface were studied using argon, silane, and acetylene. The experimental results demonstrate that a stable discharge can be established inside the tube. It was found that when the precursor gas is employed, a temperature gradient on the tube surface is formed. Secondly, PECVD experiments regarding DLC film deposition inside the inner surface of the tube are described. For this purpose, polished stainless steel and silicon wafer samples were mounted on the inside tube surface for subsequent analysis of the coatings. It was found that the growth rate and the structure properties of the DLC film varied along the axial direction of the tube. However, surfaces of DLC film with high sp3 content provided better tribological characteristics. These results were mainly attributed to complex processes of local dissociation and activation happened by collision between the electrons and neutrals.
关键词： Electric discharge,Coating inside of the tube,Temperature,PECVD,DLC
更新于2025-09-04 15:30:14