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An Electrical Analysis of a Metal-Interlayer-Semiconductor Structure on High-Quality Si <sub/> 1? <i>x</i> </sub> Ge <sub/><i>x</i> </sub> Films for Non-Alloyed Ohmic Contact
摘要： In this paper, we have investigated the effect of a metal-interlayer-semiconductor (MIS) structure on intrinsic silicon-germanium (SiGe) film which is epitaxially grown by ultra-high vacuum chemical vapor deposition (UHV-CVD). Ultra-thin dielectric materials can alleviate Fermi-level pinning at the metal/Si1?xGex contact region by preventing penetration into the Si1?xGex of metal-induced gap states (MIGS) from the metal surface. The electrical properties which are the back-to-back current density and specific contact resistivity of the Ti/TiO2/Si1?xGex structure improve at the TiO2 interlayer thickness of 0.5 nm for all kinds of Si1?xGex film with various levels of germanium (Ge) concentration. The case of Si0.7Ge0.3 film, the specific contact resistivity of a Ti/TiO2(0.5 nm)/Si0.7Ge0.3 structure is reduced 80-fold compared to that of a Ti/Si0.7Ge0.3 structure. The effect of the MIS structure has been well demonstrated on Si1?xGex film, and as a result this structure is suggested as a novel source/drain (S/D) contact scheme for advanced Si1?xGex complementary metal-oxide-semiconductor (CMOS) technology.
关键词： Epitaxial Growth,Metal-Interlayer-Semiconductor,Source/Drain Contact,Silicon-Germanium,Fermi-Level Pinning,Specific Contact Resistivity
更新于2025-09-23 15:22:29
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Functionalization of Bulk SiO2 Surface with Biomolecules for Sensing Applications: Structural and Functional Characterizations
摘要： Biomolecule immobilization on bulk silicon dioxide (SiO2) is an important aspect in the field of Si-based interfaces for biosensing. The approach used for surface preparation should guarantee not only the stable anchoring of biomolecules but also their structural integrity and biological functioning. In this paper, we review our findings on the SiO2 functionalization process to immobilize a variety of biomolecules, including glucose oxidase, horseradish peroxide, metallothionein, and DNA molecules. Morphological and chemical characterization of SiO2 surfaces after biomolecule immobilization using techniques already employed in the microelectronic industry are presented and discussed. Optical and spectrophotometric analysis revealed the preservation of biomolecules’ activity once they are anchored on the biointerface.
关键词： ssDNA,silicon,biointerface,metallothionein,TEM,horseradish peroxide,XPS,glucose oxidase
更新于2025-09-23 15:22:29
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Facile Access to a NHC-Coordinated Silicon Ring Compound with a Si=N Group and a Two-Coordinate Silicon Atom
摘要： Reaction of bicyclo[1.1.0]tetrasilatetraamide Si4{N(SiMe3)Dipp}4 1 (Dipp = 2,6-Diisopropylphenyl) with 5 equiv. of the N-heterocyclic carbene NHCMe4 (1,3,4,5-tetramethyl-imidazol-2-ylidene) affords a bifunctional carbene coordinated four-membered ring compound with a Si=N group and a two-coordinate silicon atom Si4{N(SiMe3)Dipp}2(NHCMe4)2(NDipp) 2. In a reaction of 2 with ? equiv sulfur (S8) two sulfur atoms add to the divalent silicon atom in plane and perpendicular to the plane of the Si4 ring which confirms the silylone-character of the two-coordinate silicon atom in 2.
关键词： carbene,silicon ring system,silylone,N ligands,silaimine
更新于2025-09-23 15:22:29
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Characterization of a novel silicon-containing hybrid polymer by thermal curing, pyrolysis behavior, and fluorescence analysis
摘要： A novel linear silicon-containing hybrid polymer with C C and Si H linkages, diphenyl-dihydroethynyl-silane (DPHES), had been conveniently synthesized and well characterized. The thermal curing, crosslinked structure and pyrolysis behavior were studied by DSC, Fourier transform infrared (FTIR), and Pyrolysis-gas chromatography/mass spectrometry (Py-GC/MS). The results suggest the crosslinked structures consist mainly of phenyl and aromatic fused rings, which are formed through cyclotrimerization, addition reaction, and hydrosilylation reaction. The thermal properties indicate that the crosslinked DPHES exhibits excellent thermal stability with the temperature at 5% weight loss are higher than 572 and 509 (cid:1)C under nitrogen and air atmosphere, respectively. The ?uorescence emission spectra show DPHES and its crosslinked product also have moderate ?uorescence properties, emitting purple light, and visible blue light, respectively, which further veri?ed the structure of DPHES. These results suggest that DPHES has the potential to be used as light-emitting materials with excellent thermal properties.
关键词： silicon-containing hybrid polymer,?uorescence property,pyrolysis behavior,thermal curing
更新于2025-09-23 15:22:29
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Modeling the threshold voltage variation induced by channel random dopant fluctuation in fully depleted silicon-on-insulator MOSFETs
摘要： In nanoscale fully depleted silicon-on-insulator (FD-SOI) MOSFETs, the standard deviation of threshold voltage (σVth) caused by random dopant fluctuation (RDF) is an important parameter to predict the performance of transistors and circuits. In this paper, an analytic model of σVth considering both the dopant 'number' and dopant 'position' fluctuation in channels is proposed. A new model of σVth,num caused by 'number' is given and the method of obtaining the 'position' influence ratio Rp is discussed in this paper. Moreover, the simulation methods are analyzed in detail. The calculated σVth values in FD-SOI MOSFETs are compared with the Sentaurus TCAD simulation results at different channel lengths, channel doping concentrations, SOI film thicknesses, front gate oxide thicknesses, and buried-oxide thicknesses. The comparison shows that the proposed model matches well with the obtained numerical simulation results.
关键词： threshold voltage variation,analytical model,fully depleted silicon-on-insulator MOSFETs,Sentaurus TCAD simulation,random dopant fluctuation
更新于2025-09-23 15:22:29
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Smart Supramolecular “Trojan Horse”-Inspired Nanogels for Realizing Light-Triggered Nuclear Drug Influx in Drug-Resistant Cancer Cells
摘要： Efficient nuclear delivery of anticancer drugs evading drug efflux transporters (DETs) on the plasma and nuclear membranes of multidrug-resistant cancer cells is highly challenging. Here, smart nanogels are designed via a one-step self-assembly of three functional components including a biocompatible copolymer, a fluorescent organosilica nanodot, and a photodegradable near-infrared (NIR) dye indocyanine green (ICG). The rationally designed nanogels have high drug encapsulation efficiency (≈99%) for anticancer drug doxorubicin (Dox), self-traceability for bioimaging, proper size for passive tumor targeting, prolonged blood circulation time for enhanced drug accumulation in tumor, and photocontrolled disassemblability. Moreover, the Dox-loaded nanogels can effectively kill multidrug-resistant cells via two steps: 1) They behave like a “Trojan horse” to escape from the DETs on the plasma membrane for efficiently transporting the anticancer “soldier” (Dox) into the cytoplasm and preventing the drugs from being excreted from the cells; 2) Upon NIR light irradiation, the photodegradation of ICG leads to the disassembly of the nanogels to release massive Dox molecules, which can evade the DETs on the nuclear membrane to exert their intranuclear efficacy in multidrug-resistant cells. Combined with their excellent biocompatibility, the nanogels may provide an alternative solution for overcoming cancer multidrug resistance.
关键词： nuclear delivery,photocontrollable drug release,cancer theranostics,silicon-based nanomaterials,supramolecular assembly
更新于2025-09-23 15:22:29
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Preparation and characterization of UV-curable fluorine-silicon block urethane acrylates for application in release films
摘要： A series of fluorine-silicon block urethane acrylates (PSi-FMPG-IPDI-HEMA) were synthesized from hydroxypropyl-terminated polysiloxane (PSi), newly-prepared fluorodiol (FMPG), isophorone diisocyanate (IPDI) and hydroxyethyl methacrylate (HEMA). Their molecular structures were characterized by Fourier transform infrared and gel permeation chromatography. The compatibility of the oligomers with HFMA was validated using UV–vis transmittance analysis. The thermal stability, water and chemical resistance, contact angles and anti-adhesive performance of the films were measured. It was found all the films had good thermal properties, and excellent water and chemical resistance. The FMPG content affected the surface energy and anti-adhesive performance of the films. The films with more FMPG presented lower surface energy, lower peel strength, and higher residual adhesion. More importantly, the release films designed based on the fluorine-silicon block urethane acrylates had tremendous application potential.
关键词： Anti-adhesive performance,Surface energy,Fluorine-silicon block urethane acrylates,Thermal stability
更新于2025-09-23 15:22:29
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The fabrication of 2D micromirror with large electromagnetic driving forces
摘要： The two dimensional micromirror works as a resonant actuator applied in light detection and ranging (LiDAR) devices. A deep embedded coils design was applied here to provide a large micromirror driving force. The paper describes the advantages of the structures through modal and harmonic response analysis. The fabrication process and the parameters for the fabrication of the structure are also mentioned. For the fabrication, deep etching was performed to produce the coil trenches. Electroplating was conducted subsequently and due to different growth speeds, oxide deposited at low-temperature worked as a sacrificial layer for the isolation of adjacent coils after treatment with BOE solutions (HF and NH4F solutions). Metal bridge above the oxide layer are used to form the current loop with the coils. The paper also discusses the stress issues in the fabrication processes which are caused by the different thermal expansion coefficients. The regionalized deposition of both metal and lift-off processes were taken to partially reduce the stress due to metal deposition. The SEM images of the micromirror after fabrication processes are illustrated in the paper. The open-loop sinusoidal signals generated by the signal generator verified that the 3 mm micromirror could be driven with a 5 V voltage. The horizontal and vertical swing angles are ±23.6 and ±5.7° respectively.
关键词： Micromirror,Silicon-based fabrication process,Electromagnetic driving
更新于2025-09-23 15:22:29
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An innovative technique for real-time adjusting exposure time of silicon-based camera to get stable gray level images with temperature evolution
摘要： Silicon-based sensor cameras are known to be sensitive in the near infrared spectral range, in which a small temperature variation leads to a large modi?cation in the image gray level. It induces acquired images with local saturation or poor dynamic range of gray levels. In order to address this problem, the present study proposes an innovative technique to precisely and automatically adjust the exposure time to obtain stable gray level images when the temperature evolution occurs on the surface of the observed object. Two algorithms, including linear algorithm and Planck’s algorithm, are proposed to predict the exposure time to obtain stable gray level images. Blackbody heating experiment is conducted to validate the accuracy of these two algorithms, and the result indicates that stable gray level images can be obtained using Planck’s algorithm. Moreover, this technique is applied to the specimen heating experiment, and the stable gray level images can also be obtained using Planck’s algorithm. These two experimental results prove that the technique is effective and reliable. Finally, the thermal ?elds are reconstructed on images of blackbody.
关键词： Silicon-based camera,Exposure time adjustment,Thermal ?eld,Planck’s algorithm
更新于2025-09-23 15:22:29
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Rapid liquid-phase microextraction of analytes from complex samples on superwetting porous silicon for onsite SALDI-MS analysis
摘要： To simplify the pretreatment process of complex samples is a key step for rapid detection. Herein, we report a single-step method to rapidly extract analytes with liquid-phase microextraction (LPME) from complex samples on a superwetting porous silicon (PSi) for onsite detection with surface-assisted laser desorption/ionization mass spectrometry (SALDI-MS). The operation time is less than 3 min with this simple method. The limit of detection (LOD) of malachite green in lake water is lowered to 10-13 M, that of verapamil and methadone in whole blood is down to 10-11 M and 10-13 M, in urine is 10-13 M and 10-14 M, respectively; and the ranges of quantification is up to 8 or 9 orders of magnitude with high precision (coefficients of determination (R2) > 0.98) for the complex samples. This method could provide an approach to directly extract target compounds from complex samples on substrate for SALDI-MS analysis.
关键词： SALDI-MS,porous silicon,onsite,rapid liquid-phase microextraction,superhydrophobic
更新于2025-09-23 15:22:29