研究目的
To achieve uniform and smooth molybdenum (Mo) film on a BK7 glass plate at room temperature through picosecond pulsed laser deposition.
研究成果
The study successfully demonstrates the deposition of uniform and smooth molybdenum films using picosecond pulsed laser deposition. The numerical model accurately predicts the film thickness distribution, and the experimental results show good agreement with the model. The maximum thickness variation is less than 5%, and the root-mean-square roughness is below 1.2 nm.
研究不足
The study is limited to the deposition of molybdenum films on BK7 glass substrates at room temperature. The influence of other materials and deposition conditions is not explored.
1：Experimental Design and Method Selection:
A numerical model is established to analyze the influence of linear scanning offsets on the thickness homogeneity of the deposited thin film. The experiment uses a mode-locked picosecond Nd:YAG laser for deposition.
2：Sample Selection and Data Sources:
A 99.95% purity Mo target with a diameter of 25.4 mm is used. The substrate is a BK7 glass plate.
3：95% purity Mo target with a diameter of 4 mm is used. The substrate is a BK7 glass plate.
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: Picosecond Nd:YAG laser, polygon scanner, confocal microscope, atomic force microscope, Stylus Profiler.
4：Experimental Procedures and Operational Workflow:
The laser beam scans the target surface along a linear track. The substrate is placed opposite to the target at a distance of 52 cm and performs a self-rotating movement.
5：Data Analysis Methods:
The thickness and roughness of the deposited film are measured using a Stylus Profiler and atomic force microscope.
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