研究目的
To investigate the structural and optical properties of SnO2 thin films deposited by spray ultrasonic technique by varying substrate temperature, aiming to deposit good quality layers at low substrate temperatures for applications in optoelectronic devices such as TCO layer on LEDs and solar cells.
研究成果
The spray ultrasonic technique successfully produced crystalline pure SnO2 films with polycrystalline tetragonal rutile structure. Films deposited at 350°C showed better crystallinity and columnar growth. Optical transmittance was higher than 50% in the visible region, with band gap energies ranging from 3.85 to 3.94 eV. These properties make the films suitable for applications in optoelectronic devices.
研究不足
The study focuses on the effect of substrate temperature on the properties of SnO2 thin films, but does not explore the impact of other deposition parameters such as precursor concentration or deposition rate. Additionally, the application potential in solar cells is suggested but not experimentally verified.
1：Experimental Design and Method Selection:
SnO2 thin films were prepared by spraying an alcoholic solution containing tin chloride dehydrate SnCl2 - 2H2O and CH4O onto corning glass and Si (100) wafers substrates with different temperatures (250°C, 300°C and 350°C) using ultrasonic spray process. The films were deposited with a precursor molarity of
2：05 mol/L in atmospheric pressure. The deposition time was fixed at 5 min and the nozzle-to-substrate distance was maintained at 30 cm. Sample Selection and Data Sources:
Structural characterization was performed by X-ray diffraction (XRD) and Transmission Electron Microscopy (TEM). Morphology and surface roughness were investigated using scanning electron microscopy (SEM) and Atomic Force Microscopy (AFM). Optical properties were studied using Perkin-Elmer 9 (UV-VIS-NIR) double beam spectrophotometer.
3：List of Experimental Equipment and Materials:
X’PERT Pro MPD PANalytical (Philips) diffractometer, JEOL 2010 FEG (200kV) TEM, JSM JEOL6400 SEM, Gatan ion beam thinning machine, Perkin-Elmer 9 (UV-VIS-NIR) spectrophotometer.
4：Experimental Procedures and Operational Workflow:
Films were deposited at varying substrate temperatures, followed by structural, morphological, and optical characterization.
5：Data Analysis Methods:
XRD data was analyzed for crystallinity and strain using Williamson-Hall method. Optical band gap was calculated from absorption spectra.
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