研究目的
Discuss the growth conditions and AlGaN underlying shell to block diffusion of point defects in metalorganic vapor phase epitaxy (MOVPE) to obtain high quality n-GaN nanowires and GaInN/GaN MQS, and their optical property.
研究成果
The AlGaN underlying shell was found to be effective point defect trap to improve the optical property of the MQS. The CL intensity in the MQS sample with the AlGaN underlying shell is 7 times higher than that of the sample without the AlGaN. The AlGaN may work as point defect trap, and it may result in the efficient luminescence in the MQS.
研究不足
The MQS may contain point defects acting as the nonradiative recombination centers, even though extended defect-free quality. The light emission efficiency of MQS and nanowire-based structures has not caught up with that of the existing planer LEDs.
1:Experimental Design and Method Selection:
A selective area growth technique was employed to make the periodic arrangement of n-GaN nanowires and GaInN/GaN MQSs. A very low V/III ratio of 20 and a relatively high growth temperature of 1130 °C were used in continuous-flow mode MOVPE for the growth of n-GaN nanowires. After the n-GaN growth, the substrate temperature was lowered to 740 °C, and an undoped AlGaN (10 nm) undershell and the five-period of GaInN (3 nm) / GaN (6 nm) MQS were grown.
2:Sample Selection and Data Sources:
A 30 nm-thick SiO2 mask was deposited by sputtering technique on a n-GaN template/sapphire substrate. The diameter the openings of the SiO2 mask and their pitch are 250 nm and 1,000 nm, respectively.
3:List of Experimental Equipment and Materials:
Scanning electron microscopic equipment (SU70, Hitachi Co., Japan) for CL measurement system.
4:Experimental Procedures and Operational Workflow:
The optical properties of as-grown the GaInN/GaN MQS samples were characterized by CL measurement system attached in a scanning electron microscopic equipment. The probe current was set to 35 μA with an accelerating voltage of 7 kV. The three positions along the height of the MQS grown on the m-plane were measured for the samples with and without the undoped AlGaN underlying shell underneath the MQS.
5:Data Analysis Methods:
The CL peak wavelengths and intensities were analyzed to evaluate the optical properties and the effect of the AlGaN underlying shell.
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