摘要： Single-molecule localization microscopy (SMLM) is a powerful tool which is routinely used for nanoscale optical imaging of biological samples. Recently, this approach has been applied to study optically-active defects in two-dimensional (2D) materials. Such defects can not only alter the mechanical and optoelectronic properties of 2D materials, but also bring new functionalities which make them a promising platform for integrated nanophotonics and quantum sensing. Most SMLM approaches, however, provide a field-of-view limited to ~50x50 μm2, which is not sufficient for high-throughput characterization of 2D materials. Moreover, the 2D materials themselves pose an additional challenge as their nanometer-scale thickness prevents efficient far-field excitation of optically-active defects. To overcome these limitations, we present here a waveguide-based platform for large field-of-view imaging of 2D materials via TIRF-like excitation. We use this platform to perform large-scale characterization of point defects in chemical vapor deposition (CVD)-grown hexagonal boron nitride (hBN) on an area of up to 100x1000 μm2 and demonstrate its potential for correlative imaging and high-throughput characterization of defects in 2D materials.