研究目的
To propose a millimeter-wave (mm-wave) air-filled slot antenna with a conical beam at 60 GHz, suitable for integration with various IC systems, designed and fabricated based on bulk silicon MEMS technology.
研究成果
The proposed air-filled slot antenna with conical beam at mm-wave band, designed and tested based on bulk silicon MEMS technology, shows potentials in mm-wave indoor communication with its measured reflection coefficient better than -10 dB from 59.1 GHz to 60.4 GHz, a fractional impedance bandwidth of 2.17%, and a measured peak gain of 3.21 dBi.
研究不足
The bulk silicon MEMS technology has limitations on antenna design and matching methods, making it difficult to realize multi-layer structure in conventional antenna design.
1：Experimental Design and Method Selection:
The antenna is designed with four meander slots arranged annularly and excited by a square air cavity to achieve a conical radiation pattern.
2：Sample Selection and Data Sources:
The antenna is fabricated using bulk silicon MEMS technology, with gold-plated silicon wafer.
3：List of Experimental Equipment and Materials:
Includes a square air cavity, four 'L' shape slots, and a stepped SIW transmission line for impedance matching.
4：Experimental Procedures and Operational Workflow:
The antenna's reflection coefficient, radiation pattern, and gain were measured using an Agilent N5247A network analyzer.
5：Data Analysis Methods:
The performance of the antenna was analyzed based on its operating bandwidth and peak gain.
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