研究目的
To demonstrate the performance of a hybrid external cavity photonic crystal laser comprising a semiconductor optical amplifier and a 2D photonic crystal cavity fabricated in low-temperature amorphous silicon, and to show lithographic control over amorphous silicon photonic crystal cavity-resonant wavelengths and single-mode lasing at optical telecommunications wavelengths.
研究成果
The study successfully demonstrated the operation of a hybrid external cavity photonic crystal laser with a semiconductor optical amplifier and a 2D photonic crystal cavity in low-temperature amorphous silicon. It showed lithographic control over resonant wavelengths and achieved single-mode lasing at telecommunications wavelengths, though further optimization is needed to maintain single-mode operation.
研究不足
The study was unable to maintain single-mode operation of the laser due to the length of the cavity, which could be mitigated by reducing the cavity length to the millimeter range. Additionally, the fabrication process and material properties may limit the performance and integration with CMOS technology.
1：Experimental Design and Method Selection:
The study involves the fabrication of dispersion-adapted (DA) PhC cavities in low-temperature amorphous silicon and the setup of a hybrid external cavity laser using a semiconductor optical amplifier (SOA) as the gain medium and the PhC cavity as a wavelength selective mirror.
2：Sample Selection and Data Sources:
The samples include a 220 nm thick layer of amorphous silicon deposited on a SiO2 layer on a silicon wafer, patterned with DA PhC cavities.
3：List of Experimental Equipment and Materials:
Equipment includes a scanning electron microscope (SEM), an optical spectrum analyzer (OSA), and a commercial SOA (Kamelian SOA OPA-20-N-C-F-A). Materials include amorphous silicon, SU8 polymer, and Accuglass T11 spin-on-glass.
4：Experimental Procedures and Operational Workflow:
The process involves depositing amorphous silicon, patterning PhC cavities, fabricating polymer waveguides, and characterizing the optical properties of the cavities and the laser performance.
5：Data Analysis Methods:
Optical transmission spectra and laser output spectra are analyzed to determine resonant wavelengths, Q-factors, and side-mode suppression ratios (SMSR).
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
