研究目的
Investigating the nonthermal–thermal processing boundary in drilling of ceramics using ultrashort pulse laser system with variable parameters over a wide range.
研究成果
The study demonstrated that the nonthermal–thermal process boundaries in laser drilling of ceramics are governed by both laser parameters, such as pulse duration and fluence, and material properties, particularly thermal conductivity. AlN ceramic showed distinct ablation regimes and nonthermal process windows depending on pulse duration, whereas YSZ did not exhibit nonthermal processing windows under the tested conditions. This suggests that material properties play a critical role in determining the feasibility of nonthermal laser processing.
研究不足
The study focused on two types of ceramics with significantly different thermal conductivities. The influence of other material properties on the nonthermal–thermal processing boundary was not explored. Additionally, the laser system's capabilities, while broad, may not cover all possible parameter ranges relevant to industrial applications.
1：Experimental Design and Method Selection:
The study utilized an in-house developed ultrashort pulse laser system capable of varying several parameters over a wide range, including pulse duration from 0.4 to 400 ps and repetition rate up to 1 MHz. The laser was focused on sample surfaces to a spot size of about 42 μm in air.
2：4 to 400 ps and repetition rate up to 1 MHz. The laser was focused on sample surfaces to a spot size of about 42 μm in air.
Sample Selection and Data Sources:
2. Sample Selection and Data Sources: AlN and YSZ ceramics were used as samples, with AlN having high thermal conductivity and YSZ having low thermal conductivity. The ablation volume and quality were analyzed using confocal laser scanning microscopy and FE-SEM.
3：List of Experimental Equipment and Materials:
The laser system was an Yb-doped fiber chirped-pulse amplification system operated at a wavelength of 1033 nm. A confocal laser scanning microscope (Olympus, OSL4000) and a field emission–scanning electron microscope (FE-SEM; Hitachi S-4800) were used for analysis.
4：Experimental Procedures and Operational Workflow:
Laser percussion drilling was conducted on AlN and YSZ ceramics at various pulse durations and fluences. The number of pulses was fixed at 100 for some experiments to investigate the influence of basic laser parameters.
5：Data Analysis Methods:
The ablation volume was calculated from confocal laser scanning microscopic measurements. Surface and cross-sectional morphology were observed using FE-SEM, and chemical composition was analyzed by EDX.
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