研究目的
To demonstrate low-stress, high-confinement, dispersion-engineered SiN waveguides utilizing low temperature grown reactive sputtered thin-films for optical frequency comb generation, compatible with hybrid integration with preprocessed CMOS substrates and temperature sensitive photonic platforms.
研究成果
The study successfully demonstrated CMOS-compatible high confinement SiN microring resonators based on reactive sputtering at a maximum processing temperature of 400 ○C, enabling optical frequency comb generation. This approach is suitable for hybrid integration with preprocessed CMOS substrates and temperature sensitive photonic platforms.
研究不足
The waveguide sidewall roughness and etch surface roughness could be improved with optimized masking and etching recipes. The presence of remaining H-bonds may contribute to increased loss at shorter wavelengths.
1：Experimental Design and Method Selection:
The study utilized reactive sputtering for SiN thin-film deposition, optimized for low stress and low optical loss. Waveguide and microring resonator designs were simulated for anomalous dispersion and high confinement.
2：Sample Selection and Data Sources:
SiN thin-films were deposited on 4-inch silicon wafers with a 3 μm SiO2 thermal oxide buffer layer. The films were characterized for refractive index, stress, surface roughness, and thickness uniformity.
3：List of Experimental Equipment and Materials:
A reactive magnetron sputtering tool (Evatec Clusterline? RAD), electron-beam lithography system (Vistec EBPG5000), inductive coupled plasma etching (Oxford Instrument Plasmalab 100), and PECVD for SiO2 cladding.
4：Experimental Procedures and Operational Workflow:
SiN films were deposited, annealed, and patterned into waveguides and microring resonators. Optical characterization included quality factor measurements, four-wave mixing experiments, and frequency comb generation.
5：Data Analysis Methods:
Waveguide losses and quality factors were calculated from resonance measurements. Nonlinear coefficient and refractive index were derived from four-wave mixing efficiency.
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