研究目的
To investigate the laser-induced surface damage and its mechanism of CaF2 optical window at 248 nm KrF excimer laser, focusing on the damage characteristics and laser damage resistance of CaF2 crystals.
研究成果
The study successfully replicated the finding that the rear surface is always damaged before the incident surface using 3D-FDTD simulation, showing higher laser intensity on the rear. The thermo-mechanical FEA model could reproduce the order of magnitude of the laser-induced damage threshold, despite some differences from experimental results due to unknown Ce2O3 distribution density.
研究不足
The computational grid's size may limit the simulation's accuracy in reproducing the phenomenon where the rear surface gets damaged at lower energies when the front surface is roughly polished compared to highly polished. The distribution density of Ce2O3 in CaF2 is unknown, leading to some differences between analytical and experimental results.
