研究目的
Investigating the growth of different microstructures of MoS2 via chemical vapor deposition (CVD) method through controlled processing parameters.
研究成果
The study successfully synthesized different microstructures of MoS2, including MoO2/MoS2 heterostructures and flower-like structures, by controlling processing parameters in a CVD system. This technique can be extended to fabricate different microstructures of other 2D materials.
研究不足
The study was limited by the need for precise control of processing parameters to achieve desired microstructures. Poor sulfur environment and slow vapor flow were unable to induce complete transition from MoO3-x to MoS2, forming intermediate MoO2 instead.
1：Experimental Design and Method Selection:
The study used a three-zone chemical vapor deposition (CVD) system to grow different microstructures of MoS2 by controlling processing parameters such as sulfur concentration, Ar flow, and temperature.
2：Sample Selection and Data Sources:
Cleaned SiO2/Si substrates were used, with molybdenum trioxide (MoO3) and sulfur (S) as precursors.
3：List of Experimental Equipment and Materials:
A three-zone CVD system with a 2-inch diameter quartz tube, alumina boats, MoO3 powder, sulfur powder, and Ar gas.
4：Experimental Procedures and Operational Workflow:
The substrates were placed face down on an alumina boat containing MoO3 powder in the center zone of the furnace. Sulfur powder was placed upstream. The system was evacuated and flushed with Ar gas. Temperatures and Ar flow were controlled during the reaction.
5：Data Analysis Methods:
Scanning electron microscopy (SEM) and Raman spectroscopy were used to characterize the morphologies and confirm the presence of MoS2.
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