研究目的
Investigating the transparent electrode and mechanical properties of indium tin oxide (ITO) thin films deposited from recycled targets and evaluating the effect of their heat treatment at different temperatures.
研究成果
The heat treatment test of the ITO thin film demonstrated that the transparent electrode and mechanical properties were optimally stable at 200–300°C, near the recrystallization temperature. The ITO thin film exhibited stable transparent electrode characteristics with a sheet resistance value of 7.2 Ω/sq and high transmittance of more than 85% in the visible light region, along with stable elastic modulus and hardness values under compressive stress.
研究不足
The study focuses on the properties of ITO thin films deposited from recycled targets and their heat treatment effects, but does not explore alternative materials or deposition methods. The mechanical properties evaluation is limited to nanoindentation tests under compressive stress.
1：Experimental Design and Method Selection:
ITO thin films were grown at ambient temperature by pulsed dc magnetron sputtering using a recycled target of
2：99% In2O
SnO2 (9:1) composition. The thin film was deposited on glass substrates, and various process variables were examined.
3：Sample Selection and Data Sources:
The substrate used was 20 × 20 mm glass (Corning Eagle XG) cleaned to remove impurities.
4：List of Experimental Equipment and Materials:
Equipment included an X-ray diffractometer (XRD; Bruker, D8 Advance), a field emission scanning electron microscope (FESEM; Hitachi SU8010), an atomic force microscope (AFM; Bruker, Multimode-N3-AM), X-ray photoelectron spectroscopy (XPS; ULVAC PHI, PHI 5000 Versa Probe), a Hall measurement system (Ecopia, HMS-3000), a UV–vis spectrophotometer (Sinco, S-3100), and a nano-indentation method (Micro Materials and NanoTest NTX).
5：Experimental Procedures and Operational Workflow:
The ITO thin film was deposited on the glass substrates, and heat treatment was performed for 60 min at different temperatures under ambient conditions with a high vacuum pressure.
6：Data Analysis Methods:
The crystal structure and grain size were measured using XRD, surface morphology and thickness were confirmed using FESEM and AFM, chemical bonding state was analyzed using XPS, electrical property was evaluated using the Hall measurement system, optical characterization was performed using a UV–vis spectrophotometer, and mechanical properties were analyzed using nano-indentation.
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