研究目的
Investigating the design and fabrication of photonic crystal nanobeam cavities for efficient coupling between quantum emitters and nanophotonic circuits in the visible wavelength range.
研究成果
The study demonstrates that photonic crystal nanobeam cavities can be designed and fabricated directly on-substrate with high quality factors and small mode volumes, paving the way for integrating quantum emitters with nanophotonic circuits for quantum technology applications.
研究不足
Fabrication and material imperfections limit the experimental realization of higher Q-factors for larger numbers of taper holes. The study focuses on the visible wavelength range, which presents challenging nanofabrication requirements.
1：Experimental Design and Method Selection:
The study employs deterministic and mode-matching methods for designing photonic crystal nanobeam cavities.
2：Sample Selection and Data Sources:
Silicon nitride (SiN) is used for fabricating the cavities due to its compatibility with nanofabrication processes.
3：List of Experimental Equipment and Materials:
Electron beam lithography (EBPG) and reactive ion etching are used for fabrication.
4：Experimental Procedures and Operational Workflow:
The cavities are fabricated directly on a silicon dioxide (SiO2) substrate and connected via nanophotonic waveguides to optical grating couplers.
5：Data Analysis Methods:
Transmission measurements are performed to extract Q-factors and resonance wavelengths.
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