研究目的
To prevent a decrease in ablation efficiency in processing using an ultrashort pulsed laser by proposing a processing method that can improve the ablation efficiency by providing an efficient escape path of plume.
研究成果
The proposed method of generating a fine curvature in the polymer as a preliminary preparation before laser processing was found to improve ablation efficiency by efficiently removing plumes. The method showed significant improvement in ablation efficiency, especially with larger curvatures, although delamination was observed in such cases. The study suggests that the method could be applicable to flexible devices and other fields if the method of implementing the curvature is improved.
研究不足
The study observed delamination phenomenon when a large curvature was applied, which could affect the adhesion of the adhesive layer to the top layer. Additionally, the method's applicability might be limited by the complexity of implementing the curvature in practical applications.
1：Experimental Design and Method Selection:
The study proposed a new laser ablation method that involves generating a fine curvature in the polymer as a preliminary preparation to improve ablation efficiency. The method was tested using a 10-picosecond laser of UV wavelength with two optical systems.
2：Sample Selection and Data Sources:
Multi-layer polymer samples were prepared with three layers of flexible devices, using polyethylene terephthalate (PET) film and polyimide (PI) film.
3：List of Experimental Equipment and Materials:
The experiment used an Nd:YVO4 laser with a wavelength of 355 nm and a pulse width of 10 picoseconds, objective lens (Mitutoyo), F-theta lens (SCANLAB), and x and y Galvano mirrors (SCANLAB).
4：Experimental Procedures and Operational Workflow:
The samples were processed with a fine curvature generated by pushing the sample from one side for a certain distance using a jig. The laser was then irradiated under various conditions to compare the conventional and new laser ablation methods.
5：Data Analysis Methods:
The surface condition and ablation depth of the processed samples were measured using an optical microscope (Olympus) and FE-SEM (Hitachi) equipment.
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