研究目的
To address the high manufacturing cost of quantum cascade lasers (QCLs) for chemical sensing by integrating Mid-Infrared sources on Si substrate using CMOS technology for high-volume low-cost fabrication.
研究成果
The fabrication of QCL sources on silicon substrate within a 200 mm CMOS/MEMS pilot line has been successfully reported, achieving performance comparable to QCLs fabricated on InP substrate. This approach demonstrates high fabrication yields and paves the way for the implementation of a spectrometer fully integrated on Si chip.
研究不足
The study mentions the need for further measurements at the die level to better characterize the QCL when working in pulsed mode up to 15%-duty cycle. Additionally, the self-heating processes and their effects on the quantum wells stack and electro-optical properties require further study.
