研究目的
To fabricate sensor devices based on individual SnO micro-disks as the active element and to test their response as gas sensors, aiming to understand the intrinsic response of the disks and develop low power consumption devices.
研究成果
The research demonstrated that single SnO micro-disk devices offer advantages in miniaturization and low power consumption but at the expense of reduced sensitivity compared to interconnected arrays. The study provided insights into the role of thickness and exposed surface area in gas sensing performance and reported the Debye length of SnO disks in the presence of NO2 for the first time.
研究不足
The study highlights the reduced sensitivity of single-SnO micro-disk devices compared to interconnected micro-disks arrays, indicating a trade-off between miniaturization and sensitivity. The sluggish desorption of NO2 from the surface and the limited change in resistance due to CO saturation are noted as technical constraints.
1：Experimental Design and Method Selection:
The study involved the fabrication of sensor devices based on individual SnO micro-disks using a dual beam microscope (SEM/FIB) for nanofabrication. The methodology included the preparation of SnO disks via carbothermal reduction, their isolation, and electrical connection to metallic electrodes.
2：Sample Selection and Data Sources:
SnO disks with different areas and thicknesses were selected for the study. The disks were synthesized using SnO2 powder and carbon black, followed by separation through sedimentation.
3：List of Experimental Equipment and Materials:
A dual beam microscope (Helios NanoLab 600i, FEI), Keithley 6487 stabilized voltage source, and an external heating chamber were used. Materials included SnO2 powder, carbon black, isopropyl alcohol, and Si/SiO2 substrates with interdigitated platinum electrodes.
4：Experimental Procedures and Operational Workflow:
The process involved depositing a suspension of SnO disks onto substrates, identifying and connecting an isolated SnO disk to platinum contacts using chemical vapor deposition methods, and performing gas sensing measurements by monitoring changes in resistance under exposure to NO2 and CO.
5：Data Analysis Methods:
The gas sensor response was evaluated by considering the ratio of resistances under gas exposure to baseline resistance. The Debye length was calculated to understand the sensing mechanism.
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