1：Experimental Design and Method Selection:

The study used a four-dimensional precision translation stage to position a microsphere for super-resolution imaging. Simulations were performed using the finite element method (FEM) in COMSOL multiphysics software to select the appropriate microsphere size and liquid medium.

2：Sample Selection and Data Sources:

The sample was a Blu-ray disc with nano-features of 220 nm wide stripes spaced by 130 nm groves. The simulations and experiments focused on the imaging quality obtained by different microsphere sizes in various liquids.

3：List of Experimental Equipment and Materials:

Equipment included a professional probe station (M150, Cascade Microtech), an optical microscope (PS-888 Microscope, SEIWA OPTICAL), a white light source (halogen lamp, LampLink2, OPTEM), a 50X objective lens (0.42 NA, M Plan Apo, SEIWA OPTICAL), and a colour charge-coupled device (CCD) camera (FL3-U3-13S2C-CS, point grey). Materials included barium titanate glass (BTG) microspheres, alcohol, and Cedarwood oil.

4：42 NA, M Plan Apo, SEIWA OPTICAL), and a colour charge-coupled device (CCD) camera (FL3-U3-13S2C-CS, point grey). Materials included barium titanate glass (BTG) microspheres, alcohol, and Cedarwood oil. Experimental Procedures and Operational Workflow:

4. Experimental Procedures and Operational Workflow: The microsphere was attached to a probe and submerged in alcohol. The translation stage was used to scan the microsphere across the sample surface, and images were recorded by the CCD camera. Large field-of-view images were obtained by stitching the recorded images.

5：Data Analysis Methods:

The quality of the images was analyzed based on the resolution and contrast, with simulations confirming the negligible influence of the probe and flowing liquid on imaging.