研究目的
Investigating the effectiveness of metal-halide lamps, quartz-halogen lamps, and LEDs as light sources in AOI systems for the detection of the third and fourth layers electrodes of TFT-LCDs.
研究成果
The blue LED provides the clearest images of both the third and fourth layer electrodes due to its spectrum compatibility with the TDI CCD system and better spatial resolution. It is the most suitable light source for AOI in terms of energy efficiency, performance, and environmental friendliness.
研究不足
The study is limited to the comparison of metal-halide lamps, quartz-halogen lamps, and LEDs in AOI systems for TFT-LCD inspection. The performance of other light sources or under different conditions was not explored.
1：Experimental Design and Method Selection:
The study compares the performance of metal-halide lamps, quartz-halogen lamps, and LEDs in AOI systems for TFT-LCD inspection.
2：Sample Selection and Data Sources:
Tailor-made samples of the 6th generation glass panel with TFT electrode pixels were used.
3：List of Experimental Equipment and Materials:
A commercial off-the-shelf HS 8 K TDI CCD (Piranha HS 8 K 68 kHz, TELEDYNE DALSA), a 250 Wp metal-halide lamp (PCS-UMX250, COLDSPOT, NPI), a 250 Wp quartz-halogen lamp (MHF-KFB100LR, MORITEX), and monochromatic LEDs were employed.
4：Experimental Procedures and Operational Workflow:
The experiments were conducted in a class 1000 clean-room at 25 ?C. Reflected lights from the sample were captured by the CCD and fed to the automatic data acquisition program in the host computer for data analysis.
5：Data Analysis Methods:
The performance of different light sources was compared based on the clarity and distinctiveness of the images captured.
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