研究目的
To design a voltage-controlled MEMS oscillator (VCMO) that integrates high-Q lithium niobate (LiNbO3) micromechanical resonators with CMOS technology for low power consumption, low phase noise, and wideband RF signal synthesis.
研究成果
The paper demonstrates the first VCMO based on the heterogeneous integration of a high-Q LiNbO3 micromechanical resonator and CMOS, achieving a phase noise of ?72 dBc/Hz at 1 kHz offset from a 178.23-MHz carrier and a tuning range of 2.4 MHz with a maximum dc power consumption of 72 μW. The design principles and analysis presented are applicable to any kind of piezoelectric resonators and specific for Colpitts VCMOs.
研究不足
The tuning range is mainly limited by the circuit design and not by the MEMS resonator. Future circuit optimization could extend the VCMO’s tuning range to harness most of the available bandwidth of the resonator.
1：Experimental Design and Method Selection:
The study focuses on the co-design of piezoelectric RF-MEMS resonators and CMOS for enabling VCMOs, specifically analyzing tradeoffs among tuning range, power consumption, gain, and phase noise for Colpitts VCMOs.
2：Sample Selection and Data Sources:
A LiNbO3 resonator array with specific characteristics (series resonance at
3：1 MHz, Q of 410, electromechanical coupling factor of 7%) is used. List of Experimental Equipment and Materials:
1 TSMC 65-nm RF LP CMOS technology is utilized for implementing the feedback and tuning circuitry.
4：Experimental Procedures and Operational Workflow:
Frequency tuning is achieved via a binary weighted digital capacitor bank and a varactor connected in series to the resonator.
5：Data Analysis Methods:
Phase noise performance and power consumption are measured and analyzed.
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